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Low-stress Si3N4 waveguides on sapphire substrate: (Student paper)
K. Wang, E.J.W. Berenschot, M. Dijkstra, R.M. Tiggelaar, S.M. Martinussen, L. Chang, W.A.P.M. Hendriks, B.T.H. Borgelink, R.N. Frentrop, S.M. García Blanco, N.R. Tas, V.V. Tkachuk
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review