Low TCL, High-Q Inductors in Standard CMOS

Thomas Jan Hoen*, Yanyu Jin, Anne J. Annema, Nicole Wils, Jos Verlinden, Bram Nauta

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

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Abstract

Inductors with both a high quality factor QL and a low temperature coefficient of inductance TCL are crucial for highly stable, fully integrated frequency references. We present tapered multipath inductors in a standard CMOS technology that achieve QL> 8 and TCL = 1 ppm/ °C in aluminum-based (Al) top metal and reach QL> 19 with a TCL = 30 ppm/ °C in a thick copper-based (Cu) metal layer, both at 2 GHz.
Original languageEnglish
Pages (from-to)179-182
Number of pages4
JournalIEEE Microwave and Wireless Technology Letters
Volume34
Issue number2
Early online date15 Dec 2023
DOIs
Publication statusPublished - Feb 2024

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