Low TCL, High-Q Inductors in Standard CMOS

Thomas Jan Hoen; Yanyu Jin; Anne J. Annema; Nicole Wils; Jos Verlinden; Bram Nauta

doi:10.1109/LMWT.2023.3338538

Low TCL, High-Q Inductors in Standard CMOS

Thomas Jan Hoen^*
, Yanyu Jin
, Anne J. Annema
, Nicole Wils
, Jos Verlinden
, Bram Nauta

^*Corresponding author for this work

Research output: Contribution to journal › Article › Academic › peer-review

5 Citations (Scopus)

443 Downloads (Pure)

Abstract

Inductors with both a high quality factor QL and a low temperature coefficient of inductance TCL are crucial for highly stable, fully integrated frequency references. We present tapered multipath inductors in a standard CMOS technology that achieve QL> 8 and TCL = 1 ppm/ °C in aluminum-based (Al) top metal and reach QL> 19 with a TCL = 30 ppm/ °C in a thick copper-based (Cu) metal layer, both at 2 GHz.

Original language	English
Pages (from-to)	179-182
Number of pages	4
Journal	IEEE Microwave and Wireless Technology Letters
Volume	34
Issue number	2
Early online date	15 Dec 2023
DOIs	https://doi.org/10.1109/LMWT.2023.3338538
Publication status	Published - Feb 2024

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10.1109/LMWT.2023.3338538

ArticleAccepted author version, 3.5 MB

5 Citations
2 Patent
1 Article

A Single-Trim frequency reference system with 0.7 ppm/°C from −63 °C to 165 °C Consuming 210 μW at 70 MHz
Delke, A. S. (Corresponding Author), Hoen, T. J., Annema, A. J., Jin, Y., Verlinden, J. & Nauta, B., Sept 2023, In: IEEE journal of solid-state circuits. 58, 9, p. 2585-2596 12 p.
Research output: Contribution to journal › Article › Academic › peer-review

Open Access
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17 Link opens in a new tab Citations (Scopus)

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Tapered multipath inductors
Hoen, T. J. (Inventor), Jin, Y. (Inventor), Annema, A. J. (Inventor) & Verlinden, J. (Inventor), 5 Oct 2023, Patent No. US20230317347A1, Priority date 30 Mar 2022, Priority No. US202217657173A
Research output: Patent

Open Access
Tapered multipath inductors
Hoen, T. J. (Inventor), Jin, Y. (Inventor), Annema, A. J. (Inventor) & Verlinden, J. (Inventor), 10 Oct 2023, NXP bv Eindhoven, Patent No. US 11,783,990 B1, 30 Mar 2022, Priority date 30 Mar 2022, Priority No. 17/657,173
Research output: Patent

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Cite this

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abstract = "Inductors with both a high quality factor QL and a low temperature coefficient of inductance TCL are crucial for highly stable, fully integrated frequency references. We present tapered multipath inductors in a standard CMOS technology that achieve QL> 8 and TCL = 1 ppm/ °C in aluminum-based (Al) top metal and reach QL> 19 with a TCL = 30 ppm/ °C in a thick copper-based (Cu) metal layer, both at 2 GHz. ",

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AU - Nauta, Bram

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AB - Inductors with both a high quality factor QL and a low temperature coefficient of inductance TCL are crucial for highly stable, fully integrated frequency references. We present tapered multipath inductors in a standard CMOS technology that achieve QL> 8 and TCL = 1 ppm/ °C in aluminum-based (Al) top metal and reach QL> 19 with a TCL = 30 ppm/ °C in a thick copper-based (Cu) metal layer, both at 2 GHz.

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Low TCL, High-Q Inductors in Standard CMOS

Abstract

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Research output

A Single-Trim frequency reference system with 0.7 ppm/°C from −63 °C to 165 °C Consuming 210 μW at 70 MHz

Tapered multipath inductors

Tapered multipath inductors

Cite this