Low temperature sacrificial wafer bonding for planarization after very deep etching

V.L. Spiering, J.W. Berenschot, M.C. Elwenspoek, J.H.J. Fluitman

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    3 Citations (Scopus)
    45 Downloads (Pure)

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    Physics & Astronomy