Low temperature silicidation of Pd layers on crystalline silicon monitored via in situ resistance measurements

Erik J. Faber, Rob A.M. Wolters, Bijoy Rajasekharan, Cora Salm, Jurriaan Schmitz

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    5 Citations (Scopus)
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    Chemical Compounds

    Engineering & Materials Science