Low thermal budget technology for poly-(Ge)Si thin film transistors

J.B. Rem

    Research output: ThesisPhD Thesis - Research UT, graduation UT

    Original languageUndefined
    Supervisors/Advisors
    • Verweij, J.F., Supervisor
    • Holleman, J., Advisor
    Award date5 Sep 1997
    Place of PublicationEnschede
    Publisher
    Print ISBNs90-365-0998-X
    Publication statusPublished - 5 Sep 1997

    Keywords

    • METIS-111445

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