Low thermal budget technology for poly-(Ge)Si thin film transistors

J.B. Rem

Research output: Thesis › PhD Thesis - Research UT, graduation UT

Original language	Undefined
Supervisors/Advisors	Verweij, J.F., Supervisor Holleman, J., Advisor
Award date	5 Sept 1997
Place of Publication	Enschede
Publisher	University of Twente
Print ISBNs	90-365-0998-X
Publication status	Published - 5 Sept 1997

Keywords

@phdthesis{50cddbdde2e34e5a8afc59590b3371eb,

title = "Low thermal budget technology for poly-(Ge)Si thin film transistors",

keywords = "METIS-111445",

author = "J.B. Rem",

year = "1997",

month = sep,

day = "5",

language = "Undefined",

isbn = "90-365-0998-X",

publisher = "University of Twente",

address = "Netherlands",

type = "PhD Thesis - Research UT, graduation UT",

}