Abstract
A compact electrostatic microactuator suitable for low displacement applications is proposed. The actuator employs a large number of basic units working in parallel together with a built-in mechanical transformation to generate large force. Influence of distinct design parameters on actuator performance was investigated. The actuator is successfully fabricated using the trench isolation technology. Displacement and generated force of the fabricated actuators, operated at pull-in, are measured using integrated springs and strain gauges. A large force (>1mN) with a controllable nanometer resolution step ( less than or equal 15 nm) was measured for a typical actuator design. The actuator fits in a volume of 200 × 62 × 5 μm and is operated by a voltage of 70 V. Characteristic applications can include the contraction/elongation body of an inchworm motor, vibration excitation or friction measurements
| Original language | English |
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| Title of host publication | Proceedings of the Nanotechnology Conference and Trade Show - Nanotech 2003 |
| Place of Publication | Cambridge, MA |
| Publisher | Computational Publications |
| Pages | 392-395 |
| Number of pages | 4 |
| ISBN (Print) | 0-9728422-0-9 |
| Publication status | Published - 23 Feb 2003 |
| Event | 2003 NSTI Nanotechnology Conference and Trade Show, Nanotech 2003 - Grand Hyatt San Francisco, San Francisco, United States Duration: 23 Feb 2003 → 27 Feb 2003 |
Conference
| Conference | 2003 NSTI Nanotechnology Conference and Trade Show, Nanotech 2003 |
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| Abbreviated title | Nanotech |
| Country/Territory | United States |
| City | San Francisco |
| Period | 23/02/03 → 27/02/03 |