Low volume, large force (>1mN) and nanometer resolution, electrostatic microactuator for low displacement applications

Edin Sarajlic, Johan W. Berenschot, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

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    Abstract

    A compact electrostatic microactuator suitable for low displacement applications is proposed. The actuator employs a large number of basic units working in parallel together with a built-in mechanical transformation to generate large force. Influence of distinct design parameters on actuator performance was investigated. The actuator is successfully fabricated using the trench isolation technology. Displacement and generated force of the fabricated actuators, operated at pull-in, are measured using integrated springs and strain gauges. A large force (>1mN) with a controllable nanometer resolution step ( less than or equal 15 nm) was measured for a typical actuator design. The actuator fits in a volume of 200 × 62 × 5 μm and is operated by a voltage of 70 V. Characteristic applications can include the contraction/elongation body of an inchworm motor, vibration excitation or friction measurements
    Original languageEnglish
    Title of host publicationProceedings of the Nanotechnology Conference and Trade Show - Nanotech 2003
    Place of PublicationCambridge, MA
    PublisherComputational Publications
    Pages392-395
    Number of pages4
    ISBN (Print)0-9728422-0-9
    Publication statusPublished - 23 Feb 2003
    Event2003 NSTI Nanotechnology Conference and Trade Show, Nanotech 2003 - Grand Hyatt San Francisco, San Francisco, United States
    Duration: 23 Feb 200327 Feb 2003

    Conference

    Conference2003 NSTI Nanotechnology Conference and Trade Show, Nanotech 2003
    Abbreviated titleNanotech
    CountryUnited States
    CitySan Francisco
    Period23/02/0327/02/03

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  • Cite this

    Sarajlic, E., Berenschot, J. W., Krijnen, G. J. M., & Elwenspoek, M. C. (2003). Low volume, large force (>1mN) and nanometer resolution, electrostatic microactuator for low displacement applications. In Proceedings of the Nanotechnology Conference and Trade Show - Nanotech 2003 (pp. 392-395). Cambridge, MA: Computational Publications.