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Low volume, large force (>1mN) and nanometer resolution, electrostatic microactuator for low displacement applications
Edin Sarajlic, Johan W. Berenschot, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
2
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(Scopus)
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