LPCVD of GeXSi1-x Films Using SiH4 and GeH4 Source Gases

Alexeij Y. Kovalgin, J. Holleman, Cora Salm, P.H. Woerlee, Y.V. Ponomarev

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Keywords

@inproceedings{fd2c6c73dab44419ace0c71cfe295924,

title = "LPCVD of GeXSi1-x Films Using SiH4 and GeH4 Source Gases",

keywords = "METIS-113882",

author = "Kovalgin, {Alexeij Y.} and J. Holleman and Cora Salm and P.H. Woerlee and Y.V. Ponomarev",

year = "1998",

month = nov,

day = "26",

language = "Undefined",

pages = "311--317",

booktitle = "Proceedings of the SAFE'98",

}