LPCVD SiO2 layers prepared from SiH4 and O2 at 450 degrees C in a rapid thermal processing reactor

C. Cobianu, J.B. Rem, J.H. Klootwijk, Marcel H.H. Weusthof, J. Holleman, P.H. Woerlee

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationVenetie
    Publication statusPublished - 10 Sep 1995

    Keywords

    • METIS-114871

    Cite this

    Cobianu, C., Rem, J. B., Klootwijk, J. H., Weusthof, M. H. H., Holleman, J., & Woerlee, P. H. (1995, Sep 10). LPCVD SiO2 layers prepared from SiH4 and O2 at 450 degrees C in a rapid thermal processing reactor. Venetie.
    Cobianu, C. ; Rem, J.B. ; Klootwijk, J.H. ; Weusthof, Marcel H.H. ; Holleman, J. ; Woerlee, P.H. / LPCVD SiO2 layers prepared from SiH4 and O2 at 450 degrees C in a rapid thermal processing reactor. 1995. Venetie.
    @misc{34e8c70554ee4b0c87460a8c1fc3a45b,
    title = "LPCVD SiO2 layers prepared from SiH4 and O2 at 450 degrees C in a rapid thermal processing reactor",
    keywords = "METIS-114871",
    author = "C. Cobianu and J.B. Rem and J.H. Klootwijk and Weusthof, {Marcel H.H.} and J. Holleman and P.H. Woerlee",
    year = "1995",
    month = "9",
    day = "10",
    language = "Undefined",
    type = "Other",

    }

    Cobianu, C, Rem, JB, Klootwijk, JH, Weusthof, MHH, Holleman, J & Woerlee, PH 1995, LPCVD SiO2 layers prepared from SiH4 and O2 at 450 degrees C in a rapid thermal processing reactor. Venetie.

    LPCVD SiO2 layers prepared from SiH4 and O2 at 450 degrees C in a rapid thermal processing reactor. / Cobianu, C.; Rem, J.B.; Klootwijk, J.H.; Weusthof, Marcel H.H.; Holleman, J.; Woerlee, P.H.

    Venetie. 1995, .

    Research output: Other contributionOther research output

    TY - GEN

    T1 - LPCVD SiO2 layers prepared from SiH4 and O2 at 450 degrees C in a rapid thermal processing reactor

    AU - Cobianu, C.

    AU - Rem, J.B.

    AU - Klootwijk, J.H.

    AU - Weusthof, Marcel H.H.

    AU - Holleman, J.

    AU - Woerlee, P.H.

    PY - 1995/9/10

    Y1 - 1995/9/10

    KW - METIS-114871

    M3 - Other contribution

    CY - Venetie

    ER -