LPCVD SiON layers for application in SHG devices

K. Woerhoff, Paul Lambeck, N.F. van Hulst, H. Albers, T.J.A. Popma

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 30 Jun 1994
Event	MESA Dag 1994 - Best Western Dish Hotel, Enschede, Netherlands Duration: 30 Jun 1994 → 30 Jun 1994

Keywords

@conference{187269ef4bd4430ebf607956227caa4d,

title = "LPCVD SiON layers for application in SHG devices",

keywords = "METIS-133509",

author = "K. Woerhoff and Paul Lambeck and {van Hulst}, N.F. and H. Albers and T.J.A. Popma",

year = "1994",

month = jun,

day = "30",

language = "Undefined",

pages = "--",

note = "MESA Dag 1994 ; Conference date: 30-06-1994 Through 30-06-1994",

}