LPCVD SiON layers for application in SHG devices

K. Woerhoff, Paul Lambeck, N.F. van Hulst, H. Albers, T.J.A. Popma

Research output: Contribution to conferencePosterOther research output

Original languageUndefined
Pages-
Publication statusPublished - 30 Jun 1994
EventMESA Dag 1994 - Best Western Dish Hotel, Enschede, Netherlands
Duration: 30 Jun 199430 Jun 1994

Conference

ConferenceMESA Dag 1994
CountryNetherlands
CityEnschede
Period30/06/9430/06/94
Other(MESA Day/Meeting)

Keywords

  • METIS-133509

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