LPCVD SiON layers for application in SHG devices

K. Woerhoff, Paul Lambeck, N.F. van Hulst, H. Albers, T.J.A. Popma

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 21 Nov 1994
Event	CMO Conference 1994 - Lunteren, Netherlands Duration: 21 Nov 1994 → 21 Nov 1994

Keywords

@conference{1ec1873c68d4439b9c23771b6ca17af9,

title = "LPCVD SiON layers for application in SHG devices",

keywords = "METIS-133496",

author = "K. Woerhoff and Paul Lambeck and {van Hulst}, N.F. and H. Albers and T.J.A. Popma",

year = "1994",

month = nov,

day = "21",

language = "Undefined",

pages = "--",

note = "CMO Conference 1994 ; Conference date: 21-11-1994 Through 21-11-1994",

}