LPCVD SiON layers for application in SHG devices

K. Woerhoff, Paul Lambeck, N.F. van Hulst, H. Albers, T.J.A. Popma

Research output: Contribution to conferencePoster

Original languageUndefined
Pages-
Publication statusPublished - 21 Nov 1994
EventCMO Conference 1994 - Lunteren, Netherlands
Duration: 21 Nov 199421 Nov 1994

Conference

ConferenceCMO Conference 1994
CountryNetherlands
CityLunteren
Period21/11/9421/11/94

Keywords

  • METIS-133496

Cite this

Woerhoff, K., Lambeck, P., van Hulst, N. F., Albers, H., & Popma, T. J. A. (1994). LPCVD SiON layers for application in SHG devices. -. Poster session presented at CMO Conference 1994, Lunteren, Netherlands.