LPCVD SiON layers for application in SHG devices

K. Woerhoff, Paul Lambeck, N.F. van Hulst, H. Albers, T.J.A. Popma

Research output: Contribution to conferencePoster

Original languageUndefined
Pages-
Publication statusPublished - 21 Nov 1994
EventCMO Conference 1994 - Lunteren, Netherlands
Duration: 21 Nov 199421 Nov 1994

Conference

ConferenceCMO Conference 1994
CountryNetherlands
CityLunteren
Period21/11/9421/11/94

Keywords

  • METIS-133496

Cite this

Woerhoff, K., Lambeck, P., van Hulst, N. F., Albers, H., & Popma, T. J. A. (1994). LPCVD SiON layers for application in SHG devices. -. Poster session presented at CMO Conference 1994, Lunteren, Netherlands.
Woerhoff, K. ; Lambeck, Paul ; van Hulst, N.F. ; Albers, H. ; Popma, T.J.A. / LPCVD SiON layers for application in SHG devices. Poster session presented at CMO Conference 1994, Lunteren, Netherlands.
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title = "LPCVD SiON layers for application in SHG devices",
keywords = "METIS-133496",
author = "K. Woerhoff and Paul Lambeck and {van Hulst}, N.F. and H. Albers and T.J.A. Popma",
year = "1994",
month = "11",
day = "21",
language = "Undefined",
pages = "--",
note = "null ; Conference date: 21-11-1994 Through 21-11-1994",

}

Woerhoff, K, Lambeck, P, van Hulst, NF, Albers, H & Popma, TJA 1994, 'LPCVD SiON layers for application in SHG devices' CMO Conference 1994, Lunteren, Netherlands, 21/11/94 - 21/11/94, pp. -.

LPCVD SiON layers for application in SHG devices. / Woerhoff, K.; Lambeck, Paul; van Hulst, N.F.; Albers, H.; Popma, T.J.A.

1994. - Poster session presented at CMO Conference 1994, Lunteren, Netherlands.

Research output: Contribution to conferencePoster

TY - CONF

T1 - LPCVD SiON layers for application in SHG devices

AU - Woerhoff, K.

AU - Lambeck, Paul

AU - van Hulst, N.F.

AU - Albers, H.

AU - Popma, T.J.A.

PY - 1994/11/21

Y1 - 1994/11/21

KW - METIS-133496

M3 - Poster

SP - -

ER -

Woerhoff K, Lambeck P, van Hulst NF, Albers H, Popma TJA. LPCVD SiON layers for application in SHG devices. 1994. Poster session presented at CMO Conference 1994, Lunteren, Netherlands.