LPCVD SiON layers for application in SHG devices

K. Woerhoff, Paul Lambeck, N.F. van Hulst, H. Albers, T.J.A. Popma

Research output: Contribution to conference › Poster › Other research output

Original language	English
Publication status	Published - 16 Nov 1994
Event	FOM-IOP Werkdagen Electro-Optics 1994 - Veldhoven, Netherlands Duration: 15 Nov 1994 → 16 Nov 1994

Conference	FOM-IOP Werkdagen Electro-Optics 1994
Country/Territory	Netherlands
City	Veldhoven
Period	15/11/94 → 16/11/94

Keywords

@conference{f47d59ab06424ec59f771abc810a02b4,

title = "LPCVD SiON layers for application in SHG devices",

keywords = "METIS-133504",

author = "K. Woerhoff and Paul Lambeck and {van Hulst}, N.F. and H. Albers and T.J.A. Popma",

year = "1994",

month = nov,

day = "16",

language = "English",

note = "FOM-IOP Werkdagen Electro-Optics 1994 ; Conference date: 15-11-1994 Through 16-11-1994",

}