LPCVD SiON layers for application in SHG devices

K. Woerhoff, Paul Lambeck, N.F. van Hulst, H. Albers, T.J.A. Popma

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Publication statusPublished - 16 Nov 1994
EventFOM-IOP Werkdagen Electro-Optics 1994 - Veldhoven, Netherlands
Duration: 15 Nov 199416 Nov 1994

Conference

ConferenceFOM-IOP Werkdagen Electro-Optics 1994
CountryNetherlands
CityVeldhoven
Period15/11/9416/11/94

Keywords

  • METIS-133504

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