LPCVD SiOxNy growth for integrated optics application

K. Woerhoff, Paul Lambeck, N.F. van Hulst, H. Albers

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 21 May 1994
Event	FOM-dagen 1994: Stroming & Warmte - Veldhoven, Netherlands Duration: 1 Dec 1994 → 2 Dec 1994

Keywords

@conference{39c075b4d99d486cacb12ce663d04d9e,

title = "LPCVD SiOxNy growth for integrated optics application",

keywords = "METIS-133486",

author = "K. Woerhoff and Paul Lambeck and {van Hulst}, N.F. and H. Albers",

year = "1994",

month = may,

day = "21",

language = "Undefined",

pages = "--",

note = "FOM-dagen 1994 ; Conference date: 01-12-1994 Through 02-12-1994",

}