LPCVD SiOxNy growth for integrated optics application

K. Woerhoff, Paul Lambeck, N.F. van Hulst, H. Albers

Research output: Contribution to conferencePosterOther research output

Original languageUndefined
Pages-
Publication statusPublished - 21 May 1994
EventFOM-dagen 1994: Stroming & Warmte - Veldhoven, Netherlands
Duration: 1 Dec 19942 Dec 1994

Conference

ConferenceFOM-dagen 1994
CountryNetherlands
CityVeldhoven
Period1/12/942/12/94

Keywords

  • METIS-133486

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