LPCVD SiOxNy growth for integrated optics application

K. Woerhoff, Paul Lambeck, N.F. van Hulst, H. Albers

Research output: Contribution to conferencePoster

Original languageUndefined
Pages-
Publication statusPublished - 21 May 1994
EventFOM-dagen 1994: Stroming & Warmte - Veldhoven, Netherlands
Duration: 1 Dec 19942 Dec 1994

Conference

ConferenceFOM-dagen 1994
CountryNetherlands
CityVeldhoven
Period1/12/942/12/94

Keywords

  • METIS-133486

Cite this

Woerhoff, K., Lambeck, P., van Hulst, N. F., & Albers, H. (1994). LPCVD SiOxNy growth for integrated optics application. -. Poster session presented at FOM-dagen 1994, Veldhoven, Netherlands.
Woerhoff, K. ; Lambeck, Paul ; van Hulst, N.F. ; Albers, H. / LPCVD SiOxNy growth for integrated optics application. Poster session presented at FOM-dagen 1994, Veldhoven, Netherlands.
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title = "LPCVD SiOxNy growth for integrated optics application",
keywords = "METIS-133486",
author = "K. Woerhoff and Paul Lambeck and {van Hulst}, N.F. and H. Albers",
year = "1994",
month = "5",
day = "21",
language = "Undefined",
pages = "--",
note = "null ; Conference date: 01-12-1994 Through 02-12-1994",

}

Woerhoff, K, Lambeck, P, van Hulst, NF & Albers, H 1994, 'LPCVD SiOxNy growth for integrated optics application' FOM-dagen 1994, Veldhoven, Netherlands, 1/12/94 - 2/12/94, pp. -.

LPCVD SiOxNy growth for integrated optics application. / Woerhoff, K.; Lambeck, Paul; van Hulst, N.F.; Albers, H.

1994. - Poster session presented at FOM-dagen 1994, Veldhoven, Netherlands.

Research output: Contribution to conferencePoster

TY - CONF

T1 - LPCVD SiOxNy growth for integrated optics application

AU - Woerhoff, K.

AU - Lambeck, Paul

AU - van Hulst, N.F.

AU - Albers, H.

PY - 1994/5/21

Y1 - 1994/5/21

KW - METIS-133486

M3 - Poster

SP - -

ER -

Woerhoff K, Lambeck P, van Hulst NF, Albers H. LPCVD SiOxNy growth for integrated optics application. 1994. Poster session presented at FOM-dagen 1994, Veldhoven, Netherlands.