Lubricated MEMS: effect of boundary slippage and texturing

Mohammad Tauviqirrahman

Research output: ThesisPhD Thesis - Research external, graduation UT

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Abstract

Many types of micro-electro-mechanical-system (MEMS) based products are currently employed in a variety of applications. Recently, there has been an increase in the demand for higher reliability of MEMS which incorporate moving parts for each intended application. This is because the reliability of MEMS containing moving parts is poor and has a limited lifetime. Applying a lubricant to these systems to avoid wear hampers the movement due to the adhesive/surface forces, leading to stiction. By modifying the contacting surfaces, one is able to enhance the behavior of surfaces in a controlled way and thus alter the flow pattern in the liquid lubricating film for an enhanced performance. In this thesis, the concept of complex slip surface (CSS) as an artificial (deterministic) boundary slip surface is introduced. The thesis examines the exploitation of the artificial boundary slip to improve the performance of liquid lubricated-MEMS, with the emphasis on increasing the load support and reducing the coefficient of friction. Therefore, it is of great importance to get a clear view of the concept of the artificial boundary slip with respect to the performance of lubricated-MEMS.
Original languageEnglish
Awarding Institution
  • University of Twente
Supervisors/Advisors
  • Schipper, Dirk J., Supervisor
  • Jamari, Jamari , Advisor
Award date7 Nov 2013
Place of PublicationEnschede
Publisher
Print ISBNs978-90-365-1916-8
DOIs
Publication statusPublished - 7 Nov 2013

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Texturing
Stiction
Liquids
Flow patterns
Lubricants
Adhesives
Wear of materials
Friction

Keywords

  • IR-88843
  • METIS-300296

Cite this

Tauviqirrahman, Mohammad. / Lubricated MEMS : effect of boundary slippage and texturing. Enschede : University of Twente, 2013. 162 p.
@phdthesis{7e5280d68d3348d69536a7a2152b28f6,
title = "Lubricated MEMS: effect of boundary slippage and texturing",
abstract = "Many types of micro-electro-mechanical-system (MEMS) based products are currently employed in a variety of applications. Recently, there has been an increase in the demand for higher reliability of MEMS which incorporate moving parts for each intended application. This is because the reliability of MEMS containing moving parts is poor and has a limited lifetime. Applying a lubricant to these systems to avoid wear hampers the movement due to the adhesive/surface forces, leading to stiction. By modifying the contacting surfaces, one is able to enhance the behavior of surfaces in a controlled way and thus alter the flow pattern in the liquid lubricating film for an enhanced performance. In this thesis, the concept of complex slip surface (CSS) as an artificial (deterministic) boundary slip surface is introduced. The thesis examines the exploitation of the artificial boundary slip to improve the performance of liquid lubricated-MEMS, with the emphasis on increasing the load support and reducing the coefficient of friction. Therefore, it is of great importance to get a clear view of the concept of the artificial boundary slip with respect to the performance of lubricated-MEMS.",
keywords = "IR-88843, METIS-300296",
author = "Mohammad Tauviqirrahman",
year = "2013",
month = "11",
day = "7",
doi = "10.3990/1.9789036519168",
language = "English",
isbn = "978-90-365-1916-8",
publisher = "University of Twente",
address = "Netherlands",
school = "University of Twente",

}

Lubricated MEMS : effect of boundary slippage and texturing. / Tauviqirrahman, Mohammad.

Enschede : University of Twente, 2013. 162 p.

Research output: ThesisPhD Thesis - Research external, graduation UT

TY - THES

T1 - Lubricated MEMS

T2 - effect of boundary slippage and texturing

AU - Tauviqirrahman, Mohammad

PY - 2013/11/7

Y1 - 2013/11/7

N2 - Many types of micro-electro-mechanical-system (MEMS) based products are currently employed in a variety of applications. Recently, there has been an increase in the demand for higher reliability of MEMS which incorporate moving parts for each intended application. This is because the reliability of MEMS containing moving parts is poor and has a limited lifetime. Applying a lubricant to these systems to avoid wear hampers the movement due to the adhesive/surface forces, leading to stiction. By modifying the contacting surfaces, one is able to enhance the behavior of surfaces in a controlled way and thus alter the flow pattern in the liquid lubricating film for an enhanced performance. In this thesis, the concept of complex slip surface (CSS) as an artificial (deterministic) boundary slip surface is introduced. The thesis examines the exploitation of the artificial boundary slip to improve the performance of liquid lubricated-MEMS, with the emphasis on increasing the load support and reducing the coefficient of friction. Therefore, it is of great importance to get a clear view of the concept of the artificial boundary slip with respect to the performance of lubricated-MEMS.

AB - Many types of micro-electro-mechanical-system (MEMS) based products are currently employed in a variety of applications. Recently, there has been an increase in the demand for higher reliability of MEMS which incorporate moving parts for each intended application. This is because the reliability of MEMS containing moving parts is poor and has a limited lifetime. Applying a lubricant to these systems to avoid wear hampers the movement due to the adhesive/surface forces, leading to stiction. By modifying the contacting surfaces, one is able to enhance the behavior of surfaces in a controlled way and thus alter the flow pattern in the liquid lubricating film for an enhanced performance. In this thesis, the concept of complex slip surface (CSS) as an artificial (deterministic) boundary slip surface is introduced. The thesis examines the exploitation of the artificial boundary slip to improve the performance of liquid lubricated-MEMS, with the emphasis on increasing the load support and reducing the coefficient of friction. Therefore, it is of great importance to get a clear view of the concept of the artificial boundary slip with respect to the performance of lubricated-MEMS.

KW - IR-88843

KW - METIS-300296

U2 - 10.3990/1.9789036519168

DO - 10.3990/1.9789036519168

M3 - PhD Thesis - Research external, graduation UT

SN - 978-90-365-1916-8

PB - University of Twente

CY - Enschede

ER -

Tauviqirrahman M. Lubricated MEMS: effect of boundary slippage and texturing. Enschede: University of Twente, 2013. 162 p. https://doi.org/10.3990/1.9789036519168