Abstract
We present machine learning-enhanced mass flow measurements based on microfabricated Coriolis mass flow sensors with integrated pressure and temperature sensors. Two machine learning techniques have been applied: linear regression (LR) and support vector regres- sion (SVR) on four features extracted from the raw sensor data to improve mass flow estimation. In contrast to conventional mass flow detection, LR and SVR use information from all integrated sensors to estimate the mass flow, which results in a full-scale accuracy improvement of a factor 4 for trained fluids.
Original language | English |
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Title of host publication | The 5th Conference On MicroFluidic Handling Systems (MFHS 2024) |
Pages | 65-68 |
Publication status | Published - 21 Feb 2024 |
Event | 5th Conference on MicroFluidic Handling Systems, MFHS 2024 - Munich, Germany Duration: 21 Feb 2024 → 23 Feb 2024 Conference number: 5 |
Conference
Conference | 5th Conference on MicroFluidic Handling Systems, MFHS 2024 |
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Abbreviated title | MFHS 2024 |
Country/Territory | Germany |
City | Munich |
Period | 21/02/24 → 23/02/24 |
Keywords
- Coriolis
- Mass flow
- Machine learning
- Linear regression
- Support vector regression
- Sensors
- Microfluidics