The most important motivation of this thesis is study the viscosity of water in confined nanospaces by measuring mobility of single nanoparticles. To perform mobility studies using a high numerical aperture lens from an inverted microscope, one-dimensional (1D) nanochannel devices were fabricated. 1D nanochannels were fabricated by direct bonding of a processed silicon wafer with a very thin glass wafer. We have developed a new and simple method to construct two-dimensional (2D) nanochannels using several common techniques of conventional microfabrication like underetching of a sacrificial layer, and vertically evaporation deposition. Encapsulated 2D nanochannels with both dimensions of height and width down to sub-20 nm regimes were directly obtained without requiring bonding. Fluorescence filling results proved that the fabricated channels were not leaking and that they can be used to study fluorescent solutions.
|Award date||25 Jan 2012|
|Place of Publication||Enschede|
|Publication status||Published - 25 Jan 2012|
Hoang Thi Hanh, H. T. H. (2012). Machining technologies for silicon-based nanochannels and some properties of aqueous solutions confined in these channels. Enschede: University of Twente. https://doi.org/10.3990/1.9789036532983