Mask materials in powderblasting

H. Wensink, Johan W. Berenschot, Henricus V. Jansen, Michael Curt Elwenspoek

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    Abstract

    Powderblasting has the opportunity to become a standard technology in micromachining. To machine small details with powderbalsting, it is necessary to use a suiabled mask. In this paper four mask types ares examined. BF400 resist foil is most suitable for standard use in powderblasting for reason of simplicity. A simples metal plate can be used with less accurate dimensions (> 1mm) but having the advantage of being reusable. Electroplated copper has the opportunity to be a suitable mask for machining lateral dimentions of 50 um and less. These mask materials show that there are manu ways of using powderblasting as a microtechnology.
    Original languageUndefined
    Title of host publicationMicromechanics Europe Workshop, MME '99
    Place of PublicationParis, France
    PublisherUniversité Paris-sud, Institut d'Électronique Fondamentale
    Pages199-202
    Number of pages4
    Publication statusPublished - 27 Sep 1999
    Event10th Micromechanics Europe Workshop, MME 1999 - Gif-sur-Yvette, France
    Duration: 27 Sep 199928 Sep 1999
    Conference number: 10

    Publication series

    Name
    PublisherUniversité Paris-sud, Institut d'Électronique Fondamentale

    Workshop

    Workshop10th Micromechanics Europe Workshop, MME 1999
    Abbreviated titleMME
    CountryFrance
    CityGif-sur-Yvette
    Period27/09/9928/09/99

    Keywords

    • METIS-112701
    • EWI-19726
    • IR-76224

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