Mass-balanced through-wafer electrostatic x/y-scanner for parallel probe data storage

Johannes Bernardus Charles Engelen, Hugo E. Rothuizen, Ute Drechsler, Richard Stutz, Michel Despont, Mark A. Lantz

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    In this work we describe the design, fabrication and testing of a mass-balanced planar x/y-scanner designed for parallel-probe storage applications (see Fig. 1a). We explore electrostatic actuation as an alternative to electromagnetic actuation. To increase the shock resistance, mass-balancing is used and the scanner is fabricated by deep reactive ion etching through a complete wafer. To move the scan table in both positive and negative x and y directions, four comb drives are used. The comb-drive fingers are tapered to increase the generated force without decreasing the minimum trench width.
    Original languageUndefined
    Title of host publication34th International Conference on Micro & Nano Engineering
    Place of PublicationGreece
    PublisherErgo Publications
    Number of pages1
    ISBN (Print)not assigned
    Publication statusPublished - 2008
    Event34th International Conference on Micro & Nano Engineering, MNE 2008 - Athens, Greece
    Duration: 15 Sept 200819 Sept 2008
    Conference number: 34

    Publication series

    PublisherErgo Publications


    Conference34th International Conference on Micro & Nano Engineering, MNE 2008
    Abbreviated titleMNE


    • TST-uSPAM: micro Scanning Probe Array Memory
    • TST-SMI: Formerly in EWI-SMI
    • METIS-255441
    • IR-65284
    • EWI-14849

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