Abstract
In this work we describe the design, fabrication and testing of a mass-balanced planar x/y-scanner designed for parallel-probe storage applications (see Fig. 1a). We explore electrostatic actuation as an alternative to electromagnetic actuation. To increase the shock resistance, mass-balancing is used and the scanner is fabricated by deep reactive ion etching through a complete wafer. To move the scan table in both positive and negative x and y directions, four comb drives are used. The comb-drive fingers are tapered to increase the generated force without decreasing the minimum trench width.
Original language | Undefined |
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Title of host publication | 34th International Conference on Micro & Nano Engineering |
Place of Publication | Greece |
Publisher | Ergo Publications |
Pages | 92 |
Number of pages | 1 |
ISBN (Print) | not assigned |
Publication status | Published - 2008 |
Event | 34th International Conference on Micro & Nano Engineering, MNE 2008 - Athens, Greece Duration: 15 Sept 2008 → 19 Sept 2008 Conference number: 34 |
Publication series
Name | |
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Publisher | Ergo Publications |
Number | 412 |
Conference
Conference | 34th International Conference on Micro & Nano Engineering, MNE 2008 |
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Abbreviated title | MNE |
Country/Territory | Greece |
City | Athens |
Period | 15/09/08 → 19/09/08 |
Keywords
- TST-uSPAM: micro Scanning Probe Array Memory
- TST-SMI: Formerly in EWI-SMI
- METIS-255441
- IR-65284
- EWI-14849