Abstract
In this work we describe the design, fabrication and testing of a mass-balanced planar x/y-scanner designed for parallel-probe storage applications (see Fig. 1a). We explore electrostatic actuation as an alternative to electromagnetic actuation. To increase the shock resistance, mass-balancing is used and the scanner is fabricated by deep reactive ion etching through a complete wafer. To move the scan table in both positive and negative x and y directions, four comb drives are used. The comb-drive fingers are tapered to increase the generated force without decreasing the minimum trench width.
| Original language | Undefined |
|---|---|
| Title of host publication | 34th International Conference on Micro & Nano Engineering |
| Place of Publication | Greece |
| Publisher | Ergo Publications |
| Pages | 92 |
| Number of pages | 1 |
| ISBN (Print) | not assigned |
| Publication status | Published - 2008 |
| Event | 34th International Conference on Micro & Nano Engineering, MNE 2008 - Athens, Greece Duration: 15 Sep 2008 → 19 Sep 2008 Conference number: 34 |
Publication series
| Name | |
|---|---|
| Publisher | Ergo Publications |
| Number | 412 |
Conference
| Conference | 34th International Conference on Micro & Nano Engineering, MNE 2008 |
|---|---|
| Abbreviated title | MNE |
| Country | Greece |
| City | Athens |
| Period | 15/09/08 → 19/09/08 |
Keywords
- TST-uSPAM: micro Scanning Probe Array Memory
- TST-SMI: Formerly in EWI-SMI
- METIS-255441
- IR-65284
- EWI-14849
Cite this
Engelen, J. B. C., Rothuizen, H. E., Drechsler, U., Stutz, R., Despont, M., & Lantz, M. A. (2008). Mass-balanced through-wafer electrostatic x/y-scanner for parallel probe data storage. In 34th International Conference on Micro & Nano Engineering (pp. 92). Greece: Ergo Publications.