Mass flowmeter

    Research output: Patent

    75 Downloads (Pure)


    A mass flowmeter of the thermal type, having a planar, thin substrate with a sensing surface that can be brought into direct or indirect contact with a flowing fluid during a measurement, wherein electrically controllable heating elements and temperature sensor elements for determining a temperature difference are provided on the sensing surface by a planar technique. The substrate with its sensing surface is present in particular in a cavity of a module into which a feed line and a drain line for the fluid issue.
    Original languageUndefined
    Patent numberUS6945106
    Publication statusAccepted/In press - 20 Sept 2005


    • EWI-20127
    • IR-76486

    Cite this