Abstract
A mass flowmeter of the thermal type, having a planar, thin substrate with a sensing surface that can be brought into direct or indirect contact with a flowing fluid during a measurement, wherein electrically controllable heating elements and temperature sensor elements for determining a temperature difference are provided on the sensing surface by a planar technique. The substrate with its sensing surface is present in particular in a cavity of a module into which a feed line and a drain line for the fluid issue.
Original language | Undefined |
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Patent number | US6945106 |
Publication status | Accepted/In press - 20 Sept 2005 |
Keywords
- EWI-20127
- IR-76486