Mass flowmeter

    Research output: Patent

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    A mass flowmeter of the thermal type, having a planar, thin substrate with a sensing surface that can be brought into direct or indirect contact with a flowing fluid during a measurement, wherein electrically controllable heating elements and temperature sensor elements for determining a temperature difference are provided on the sensing surface by a planar technique. The substrate with its sensing surface is present in particular in a cavity of a module into which a feed line and a drain line for the fluid issue.
    Original languageUndefined
    Patent numberUS20040841461
    Publication statusSubmitted - 10 May 2004


    • EWI-19892

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