Mass flowmeter

Joost Conrad Lötters

Mass flowmeter

Research output: Patent

17 Downloads (Pure)

Abstract

A mass flowmeter of the thermal type, having a planar, thin substrate with a sensing surface that can be brought into direct or indirect contact with a flowing fluid during a measurement, wherein electrically controllable heating elements and temperature sensor elements for determining a temperature difference are provided on the sensing surface by a planar technique. The substrate with its sensing surface is present in particular in a cavity of a module into which a feed line and a drain line for the fluid issue.

Original language	Undefined
Patent number	US20040841461
Publication status	Submitted - 10 May 2004

Keywords

EWI-19892

Access to Document

US6945106B2_-_joost

http://v3.espacenet.com/publicationDetails/biblio?DB=EPODOC&adjacent=true&locale=en_EP&FT=D&date=20041230&CC=US&NR=2004261520A1&KC=A1

Cite this

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N2 - A mass flowmeter of the thermal type, having a planar, thin substrate with a sensing surface that can be brought into direct or indirect contact with a flowing fluid during a measurement, wherein electrically controllable heating elements and temperature sensor elements for determining a temperature difference are provided on the sensing surface by a planar technique. The substrate with its sensing surface is present in particular in a cavity of a module into which a feed line and a drain line for the fluid issue.

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