Mass transport in a partially covered fluid-filled cavity

C.H. Driesen, Johannes G.M. Kuerten, H.K. Kuiken, H.K. Kuiken

Research output: Book/ReportReportOther research output

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Abstract

A method of computing the concentration field of dissolved material inside an etch-hole is presented. Using a number of assumptions, approximate convection-diffusion equations are formulated, and analytical descriptions for the concentration in different parts of the domain are obtained. By coupling these descriptions the concentration field can be computed. The assumptions and the results are validated by comparison with solutions based on a finite-volume method. Results of the boundary-layer method are given for two characteristic etch-hole geometries. The described boundary-layer method is efficient in terms of computational time and memory, because it does not require the construction of a computational grid in the interior of the domain. This advantage will be exploited in a future paper where the method will be used to simulate wet-chemical etching.
Original languageUndefined
Place of PublicationEnschede
PublisherUniversity of Twente, Department of Applied Mathematics
Publication statusPublished - 1998

Publication series

Name
PublisherDepartment of Applied Mathematics, University of Twente
No.1474
ISSN (Print)0169-2690

Keywords

  • MSC-45F05
  • MSC-33C10
  • EWI-3294
  • MSC-80A20
  • IR-65663
  • MSC-76D10

Cite this

Driesen, C. H., Kuerten, J. G. M., Kuiken, H. K., & Kuiken, H. K. (1998). Mass transport in a partially covered fluid-filled cavity. Enschede: University of Twente, Department of Applied Mathematics.
Driesen, C.H. ; Kuerten, Johannes G.M. ; Kuiken, H.K. ; Kuiken, H.K. / Mass transport in a partially covered fluid-filled cavity. Enschede : University of Twente, Department of Applied Mathematics, 1998.
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abstract = "A method of computing the concentration field of dissolved material inside an etch-hole is presented. Using a number of assumptions, approximate convection-diffusion equations are formulated, and analytical descriptions for the concentration in different parts of the domain are obtained. By coupling these descriptions the concentration field can be computed. The assumptions and the results are validated by comparison with solutions based on a finite-volume method. Results of the boundary-layer method are given for two characteristic etch-hole geometries. The described boundary-layer method is efficient in terms of computational time and memory, because it does not require the construction of a computational grid in the interior of the domain. This advantage will be exploited in a future paper where the method will be used to simulate wet-chemical etching.",
keywords = "MSC-45F05, MSC-33C10, EWI-3294, MSC-80A20, IR-65663, MSC-76D10",
author = "C.H. Driesen and Kuerten, {Johannes G.M.} and H.K. Kuiken and H.K. Kuiken",
note = "Imported from MEMORANDA",
year = "1998",
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publisher = "University of Twente, Department of Applied Mathematics",
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}

Driesen, CH, Kuerten, JGM, Kuiken, HK & Kuiken, HK 1998, Mass transport in a partially covered fluid-filled cavity. University of Twente, Department of Applied Mathematics, Enschede.

Mass transport in a partially covered fluid-filled cavity. / Driesen, C.H.; Kuerten, Johannes G.M.; Kuiken, H.K.; Kuiken, H.K.

Enschede : University of Twente, Department of Applied Mathematics, 1998.

Research output: Book/ReportReportOther research output

TY - BOOK

T1 - Mass transport in a partially covered fluid-filled cavity

AU - Driesen, C.H.

AU - Kuerten, Johannes G.M.

AU - Kuiken, H.K.

AU - Kuiken, H.K.

N1 - Imported from MEMORANDA

PY - 1998

Y1 - 1998

N2 - A method of computing the concentration field of dissolved material inside an etch-hole is presented. Using a number of assumptions, approximate convection-diffusion equations are formulated, and analytical descriptions for the concentration in different parts of the domain are obtained. By coupling these descriptions the concentration field can be computed. The assumptions and the results are validated by comparison with solutions based on a finite-volume method. Results of the boundary-layer method are given for two characteristic etch-hole geometries. The described boundary-layer method is efficient in terms of computational time and memory, because it does not require the construction of a computational grid in the interior of the domain. This advantage will be exploited in a future paper where the method will be used to simulate wet-chemical etching.

AB - A method of computing the concentration field of dissolved material inside an etch-hole is presented. Using a number of assumptions, approximate convection-diffusion equations are formulated, and analytical descriptions for the concentration in different parts of the domain are obtained. By coupling these descriptions the concentration field can be computed. The assumptions and the results are validated by comparison with solutions based on a finite-volume method. Results of the boundary-layer method are given for two characteristic etch-hole geometries. The described boundary-layer method is efficient in terms of computational time and memory, because it does not require the construction of a computational grid in the interior of the domain. This advantage will be exploited in a future paper where the method will be used to simulate wet-chemical etching.

KW - MSC-45F05

KW - MSC-33C10

KW - EWI-3294

KW - MSC-80A20

KW - IR-65663

KW - MSC-76D10

M3 - Report

BT - Mass transport in a partially covered fluid-filled cavity

PB - University of Twente, Department of Applied Mathematics

CY - Enschede

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Driesen CH, Kuerten JGM, Kuiken HK, Kuiken HK. Mass transport in a partially covered fluid-filled cavity. Enschede: University of Twente, Department of Applied Mathematics, 1998.