This thesis describes several approaches for material characterization using helium ion microscopy (HIM). Furthermore, it also demonstrates a possibility for in-situ observation and investigation of material modification and defect creation. This has been done using He+ ions with an energy of several tens of keV. The influence of a sub-nanometer He+ ion beam on different classes of materials, such as metals, semiconductors and insulators, was studied in the current work.
|Award date||21 Mar 2014|
|Place of Publication||Enschede|
|Publication status||Published - 21 Mar 2014|