Material characterization and modification using helium ion microscopy: various examples

V. Veligura

Research output: ThesisPhD Thesis - Research UT, graduation UT

95 Downloads (Pure)

Abstract

This thesis describes several approaches for material characterization using helium ion microscopy (HIM). Furthermore, it also demonstrates a possibility for in-situ observation and investigation of material modification and defect creation. This has been done using He+ ions with an energy of several tens of keV. The influence of a sub-nanometer He+ ion beam on different classes of materials, such as metals, semiconductors and insulators, was studied in the current work.
Original languageEnglish
Awarding Institution
  • University of Twente
Supervisors/Advisors
  • Poelsema, B., Supervisor
  • Hlawacek, G., Advisor
  • van Gastel, Raoul, Advisor
Award date21 Mar 2014
Place of PublicationEnschede
Publisher
Print ISBNs978-90-365-3627-1
DOIs
Publication statusPublished - 21 Mar 2014

Keywords

  • METIS-303018
  • IR-90190

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