Material characterization and modification using helium ion microscopy: various examples

V. Veligura

doi:10.3990/1.9789036536271

Material characterization and modification using helium ion microscopy: various examples

V. Veligura

Research output: Thesis › PhD Thesis - Research UT, graduation UT

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Abstract

This thesis describes several approaches for material characterization using helium ion microscopy (HIM). Furthermore, it also demonstrates a possibility for in-situ observation and investigation of material modification and defect creation. This has been done using He+ ions with an energy of several tens of keV. The influence of a sub-nanometer He+ ion beam on different classes of materials, such as metals, semiconductors and insulators, was studied in the current work.

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	University of Twente
Supervisors/Advisors	Poelsema, B., Supervisor Hlawacek, G., Advisor van Gastel, Raoul, Advisor
Award date	21 Mar 2014
Place of Publication	Enschede
Publisher	University of Twente
Print ISBNs	978-90-365-3627-1
DOIs	https://doi.org/10.3990/1.9789036536271
Publication status	Published - 21 Mar 2014

Keywords

METIS-303018
IR-90190

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10.3990/1.9789036536271

thesis_V_VeliguraFinal published version, 55.9 MB

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title = "Material characterization and modification using helium ion microscopy: various examples",

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AB - This thesis describes several approaches for material characterization using helium ion microscopy (HIM). Furthermore, it also demonstrates a possibility for in-situ observation and investigation of material modification and defect creation. This has been done using He+ ions with an energy of several tens of keV. The influence of a sub-nanometer He+ ion beam on different classes of materials, such as metals, semiconductors and insulators, was studied in the current work.

KW - METIS-303018

KW - IR-90190

U2 - 10.3990/1.9789036536271

DO - 10.3990/1.9789036536271

M3 - PhD Thesis - Research UT, graduation UT

SN - 978-90-365-3627-1

PB - University of Twente

CY - Enschede

ER -

Material characterization and modification using helium ion microscopy: various examples

Abstract

Keywords

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