Material ejection during drilling with a long pulse excimer laser

A. Schoonderbeek, C.A. Biesheuvel, Klaus J. Boller, R.M. Hofstra, J. Meijer

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
Original languageUndefined
Title of host publicationProceedings of the ICALEO'03 Laser Micro Fabrication Section E (cd-rom)
Place of PublicationJacksonville (FL), USA
PublisherLIA
PagesE59-E66
Number of pages8
Publication statusPublished - 13 Oct 2003
Event22nd International Congress on Applications of Lasers & Electro-Optics, ICALEO 2003 - Jacksonville, United States
Duration: 13 Oct 200316 Oct 2003
Conference number: 22

Conference

Conference22nd International Congress on Applications of Lasers & Electro-Optics, ICALEO 2003
Abbreviated titleICALEO
CountryUnited States
CityJacksonville
Period13/10/0316/10/03

Keywords

  • METIS-212313

Cite this

Schoonderbeek, A., Biesheuvel, C. A., Boller, K. J., Hofstra, R. M., & Meijer, J. (2003). Material ejection during drilling with a long pulse excimer laser. In Proceedings of the ICALEO'03 Laser Micro Fabrication Section E (cd-rom) (pp. E59-E66). Jacksonville (FL), USA: LIA.