Material ejection during drilling with a long pulse excimer laser

A. Schoonderbeek, C.A. Biesheuvel, Klaus J. Boller, R.M. Hofstra, J. Meijer

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
Original languageUndefined
Title of host publicationProceedings of the ICALEO'03 Laser Micro Fabrication Section E (cd-rom)
Place of PublicationJacksonville (FL), USA
PublisherLIA
PagesE59-E66
Number of pages8
Publication statusPublished - 13 Oct 2003
Event22nd International Congress on Applications of Lasers & Electro-Optics, ICALEO 2003 - Jacksonville, United States
Duration: 13 Oct 200316 Oct 2003
Conference number: 22

Conference

Conference22nd International Congress on Applications of Lasers & Electro-Optics, ICALEO 2003
Abbreviated titleICALEO
CountryUnited States
CityJacksonville
Period13/10/0316/10/03

Keywords

  • METIS-212313

Cite this

Schoonderbeek, A., Biesheuvel, C. A., Boller, K. J., Hofstra, R. M., & Meijer, J. (2003). Material ejection during drilling with a long pulse excimer laser. In Proceedings of the ICALEO'03 Laser Micro Fabrication Section E (cd-rom) (pp. E59-E66). Jacksonville (FL), USA: LIA.
Schoonderbeek, A. ; Biesheuvel, C.A. ; Boller, Klaus J. ; Hofstra, R.M. ; Meijer, J. / Material ejection during drilling with a long pulse excimer laser. Proceedings of the ICALEO'03 Laser Micro Fabrication Section E (cd-rom). Jacksonville (FL), USA : LIA, 2003. pp. E59-E66
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title = "Material ejection during drilling with a long pulse excimer laser",
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author = "A. Schoonderbeek and C.A. Biesheuvel and Boller, {Klaus J.} and R.M. Hofstra and J. Meijer",
year = "2003",
month = "10",
day = "13",
language = "Undefined",
pages = "E59--E66",
booktitle = "Proceedings of the ICALEO'03 Laser Micro Fabrication Section E (cd-rom)",
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Schoonderbeek, A, Biesheuvel, CA, Boller, KJ, Hofstra, RM & Meijer, J 2003, Material ejection during drilling with a long pulse excimer laser. in Proceedings of the ICALEO'03 Laser Micro Fabrication Section E (cd-rom). LIA, Jacksonville (FL), USA, pp. E59-E66, 22nd International Congress on Applications of Lasers & Electro-Optics, ICALEO 2003, Jacksonville, United States, 13/10/03.

Material ejection during drilling with a long pulse excimer laser. / Schoonderbeek, A.; Biesheuvel, C.A.; Boller, Klaus J.; Hofstra, R.M.; Meijer, J.

Proceedings of the ICALEO'03 Laser Micro Fabrication Section E (cd-rom). Jacksonville (FL), USA : LIA, 2003. p. E59-E66.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Material ejection during drilling with a long pulse excimer laser

AU - Schoonderbeek, A.

AU - Biesheuvel, C.A.

AU - Boller, Klaus J.

AU - Hofstra, R.M.

AU - Meijer, J.

PY - 2003/10/13

Y1 - 2003/10/13

KW - METIS-212313

M3 - Conference contribution

SP - E59-E66

BT - Proceedings of the ICALEO'03 Laser Micro Fabrication Section E (cd-rom)

PB - LIA

CY - Jacksonville (FL), USA

ER -

Schoonderbeek A, Biesheuvel CA, Boller KJ, Hofstra RM, Meijer J. Material ejection during drilling with a long pulse excimer laser. In Proceedings of the ICALEO'03 Laser Micro Fabrication Section E (cd-rom). Jacksonville (FL), USA: LIA. 2003. p. E59-E66