Materials aspects of integrated high Tc dc-SQUID magnetometer fabrication

J.W.M. Hilgenkamp, R.P.J. IJsselsteijn, A.J.H.M. Rijnders, P.A.C. Tavares, J. Flokstra, H. Rogalla

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An integrated high Tc dc-SQUID magnetometer is being developed. It has in total 10 layers of five different materials. Various materials aspects of the fabrication process will be discussed, especially the smoothness of the films and the techniques to obtain smooth edges. Cross-overs and superconducting window contacts were fabricated. The critical temperature of the window-contact is 84K (jc(77K)=2·105 A/cm2) and the resistivity of the insulating SrTiO3 layer in the cross-over is 6·105 Ωcm at 77K. The complete coil often shows a small resistive component down to about 50K. Ramp type and bi-epitaxial grain boundary dc-SQUIDs show voltage modulation up to 65K and 79K, respectively. Efforts to fabricate an integrated high Tc dc-SQUID magnetometer will be discussed.
Original languageEnglish
Pages (from-to)707-710
Number of pages4
JournalJournal of alloys and compounds
Publication statusPublished - 1993
EventE-MRS Fall Meeting 1992 - Strasbourg, France
Duration: 3 Nov 19926 Nov 1992


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