Materials aspects of integrated high Tc dc-SQUID magnetometer fabrication

J.W.M. Hilgenkamp; R.P.J. IJsselsteijn; A.J.H.M. Rijnders; P.A.C. Tavares; J. Flokstra; H. Rogalla

doi:10.1016/0925-8388(93)90835-B

Materials aspects of integrated high Tc dc-SQUID magnetometer fabrication

J.W.M. Hilgenkamp, R.P.J. IJsselsteijn, A.J.H.M. Rijnders, P.A.C. Tavares, J. Flokstra, H. Rogalla

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Abstract

An integrated high Tc dc-SQUID magnetometer is being developed. It has in total 10 layers of five different materials. Various materials aspects of the fabrication process will be discussed, especially the smoothness of the films and the techniques to obtain smooth edges. Cross-overs and superconducting window contacts were fabricated. The critical temperature of the window-contact is 84K (jc(77K)=2·105 A/cm2) and the resistivity of the insulating SrTiO3 layer in the cross-over is 6·105 Ωcm at 77K. The complete coil often shows a small resistive component down to about 50K. Ramp type and bi-epitaxial grain boundary dc-SQUIDs show voltage modulation up to 65K and 79K, respectively. Efforts to fabricate an integrated high Tc dc-SQUID magnetometer will be discussed.

Original language	English
Pages (from-to)	707-710
Number of pages	4
Journal	Journal of alloys and compounds
Volume	195
DOIs	https://doi.org/10.1016/0925-8388(93)90835-B
Publication status	Published - 1993
Event	E-MRS Fall Meeting 1992 - Strasbourg, France Duration: 3 Nov 1992 → 6 Nov 1992

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@article{595f61dd485f4753bccc1785c832acb5,

title = "Materials aspects of integrated high Tc dc-SQUID magnetometer fabrication",

abstract = "An integrated high Tc dc-SQUID magnetometer is being developed. It has in total 10 layers of five different materials. Various materials aspects of the fabrication process will be discussed, especially the smoothness of the films and the techniques to obtain smooth edges. Cross-overs and superconducting window contacts were fabricated. The critical temperature of the window-contact is 84K (jc(77K)=2·105 A/cm2) and the resistivity of the insulating SrTiO3 layer in the cross-over is 6·105 Ωcm at 77K. The complete coil often shows a small resistive component down to about 50K. Ramp type and bi-epitaxial grain boundary dc-SQUIDs show voltage modulation up to 65K and 79K, respectively. Efforts to fabricate an integrated high Tc dc-SQUID magnetometer will be discussed.",

author = "J.W.M. Hilgenkamp and R.P.J. IJsselsteijn and A.J.H.M. Rijnders and P.A.C. Tavares and J. Flokstra and H. Rogalla",

year = "1993",

doi = "10.1016/0925-8388(93)90835-B",

language = "English",

volume = "195",

pages = "707--710",

journal = "Journal of alloys and compounds",

issn = "0925-8388",

publisher = "Elsevier B.V.",

note = "E-MRS Fall Meeting 1992 ; Conference date: 03-11-1992 Through 06-11-1992",

}

TY - JOUR

T1 - Materials aspects of integrated high Tc dc-SQUID magnetometer fabrication

AU - Hilgenkamp, J.W.M.

AU - IJsselsteijn, R.P.J.

AU - Rijnders, A.J.H.M.

AU - Tavares, P.A.C.

AU - Flokstra, J.

AU - Rogalla, H.

PY - 1993

Y1 - 1993

N2 - An integrated high Tc dc-SQUID magnetometer is being developed. It has in total 10 layers of five different materials. Various materials aspects of the fabrication process will be discussed, especially the smoothness of the films and the techniques to obtain smooth edges. Cross-overs and superconducting window contacts were fabricated. The critical temperature of the window-contact is 84K (jc(77K)=2·105 A/cm2) and the resistivity of the insulating SrTiO3 layer in the cross-over is 6·105 Ωcm at 77K. The complete coil often shows a small resistive component down to about 50K. Ramp type and bi-epitaxial grain boundary dc-SQUIDs show voltage modulation up to 65K and 79K, respectively. Efforts to fabricate an integrated high Tc dc-SQUID magnetometer will be discussed.

AB - An integrated high Tc dc-SQUID magnetometer is being developed. It has in total 10 layers of five different materials. Various materials aspects of the fabrication process will be discussed, especially the smoothness of the films and the techniques to obtain smooth edges. Cross-overs and superconducting window contacts were fabricated. The critical temperature of the window-contact is 84K (jc(77K)=2·105 A/cm2) and the resistivity of the insulating SrTiO3 layer in the cross-over is 6·105 Ωcm at 77K. The complete coil often shows a small resistive component down to about 50K. Ramp type and bi-epitaxial grain boundary dc-SQUIDs show voltage modulation up to 65K and 79K, respectively. Efforts to fabricate an integrated high Tc dc-SQUID magnetometer will be discussed.

U2 - 10.1016/0925-8388(93)90835-B

DO - 10.1016/0925-8388(93)90835-B

M3 - Article

SN - 0925-8388

VL - 195

SP - 707

EP - 710

JO - Journal of alloys and compounds

JF - Journal of alloys and compounds

T2 - E-MRS Fall Meeting 1992

Y2 - 3 November 1992 through 6 November 1992

ER -

Materials aspects of integrated high Tc dc-SQUID magnetometer fabrication

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