Materials for mechanical and optical microsystems

M.L. Reed, Michael Curt Elwenspoek, S. Johansson, E. Obermeier, H. Fujita, Y. Uenishi

    Research output: Book/ReportBookAcademic

    Original languageUndefined
    Place of PublicationPittsburgh, Pennsylvania
    PublisherMaterials Research Society
    Number of pages242
    ISBN (Print)1-55899-348-7
    Publication statusPublished - 1997

    Publication series

    PublisherMaterials Research Society


    • IR-15569
    • METIS-112451

    Cite this

    Reed, M. L., Elwenspoek, M. C., Johansson, S., Obermeier, E., Fujita, H., & Uenishi, Y. (1997). Materials for mechanical and optical microsystems. Pittsburgh, Pennsylvania: Materials Research Society.