Materials for mechanical and optical microsystems

M.L. Reed, Michael Curt Elwenspoek, S. Johansson, E. Obermeier, H. Fujita, Y. Uenishi

Research output: Book/Report › Book › Academic

Name
Publisher	Materials Research Society

Keywords

@book{a984f5af689749528ac943cd6e4ac2e2,

title = "Materials for mechanical and optical microsystems",

keywords = "IR-15569, METIS-112451",

author = "M.L. Reed and Elwenspoek, {Michael Curt} and S. Johansson and E. Obermeier and H. Fujita and Y. Uenishi",

year = "1997",

language = "Undefined",

isbn = "1-55899-348-7",

publisher = "Materials Research Society",

address = "United States",

}

TY - BOOK

T1 - Materials for mechanical and optical microsystems

AU - Reed, M.L.

AU - Elwenspoek, Michael Curt

AU - Johansson, S.

AU - Obermeier, E.

AU - Fujita, H.

AU - Uenishi, Y.

PY - 1997

Y1 - 1997

KW - IR-15569

KW - METIS-112451

M3 - Book

SN - 1-55899-348-7

BT - Materials for mechanical and optical microsystems

PB - Materials Research Society

CY - Pittsburgh, Pennsylvania

ER -