Materials selection for low temperature processed high Q resonators using ashby approach

S.N.R. Kazmi; Cora Salm; Jurriaan Schmitz

Materials selection for low temperature processed high Q resonators using ashby approach

S.N.R. Kazmi, Cora Salm, Jurriaan Schmitz

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Abstract

MicroElectroMechanical Systems (MEMS) is an emerging class of microfabrication technology that can truly be anticipated as an enabling technology for future radio frequency (RF) communications. This work focuses on the material selection using the Ashby approach for the high-Q resonators that need to be monolithically post processed on top of CMOS chip conforming to the requirement of thermal budget, stress and plasma induced damages for post processing.

Original language	Undefined
Title of host publication	Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors
Place of Publication	Utrecht, The Netherlands
Publisher	STW
Pages	81-84
Number of pages	4
ISBN (Print)	978-90-73461-62-8
Publication status	Published - 26 Nov 2009
Event	12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2009 - Veldhoven, Netherlands Duration: 26 Nov 2009 → 27 Nov 2009 Conference number: 12

Publication series

Name
Publisher	Technology Foundation STW

Conference

Conference	12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2009
Abbreviated title	SAFE
Country/Territory	Netherlands
City	Veldhoven
Period	26/11/09 → 27/11/09

Keywords

METIS-264275
Material selection
IR-69060
Post processing
EWI-17072
Radio frequency (RF)
MEMS
SC-ICF: Integrated Circuit Fabrication
Resonators

Access to Document

http://eprints.eemcs.utwente.nl/secure2/17072/01/kazmi.pdf

Cite this

@inproceedings{543e9b12f50246c38456050eb2699f61,

title = "Materials selection for low temperature processed high Q resonators using ashby approach",

abstract = "MicroElectroMechanical Systems (MEMS) is an emerging class of microfabrication technology that can truly be anticipated as an enabling technology for future radio frequency (RF) communications. This work focuses on the material selection using the Ashby approach for the high-Q resonators that need to be monolithically post processed on top of CMOS chip conforming to the requirement of thermal budget, stress and plasma induced damages for post processing.",

keywords = "METIS-264275, Material selection, IR-69060, Post processing, EWI-17072, Radio frequency (RF), MEMS, SC-ICF: Integrated Circuit Fabrication, Resonators",

author = "S.N.R. Kazmi and Cora Salm and Jurriaan Schmitz",

year = "2009",

month = nov,

day = "26",

language = "Undefined",

isbn = "978-90-73461-62-8",

publisher = "STW",

pages = "81--84",

booktitle = "Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors",

note = "12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2009 ; Conference date: 26-11-2009 Through 27-11-2009",

}

Kazmi, SNR, Salm, C & Schmitz, J 2009, Materials selection for low temperature processed high Q resonators using ashby approach. in Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. STW, Utrecht, The Netherlands, pp. 81-84, 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2009, Veldhoven, Netherlands, 26/11/09. <http://eprints.eemcs.utwente.nl/secure2/17072/01/kazmi.pdf>

Materials selection for low temperature processed high Q resonators using ashby approach. / Kazmi, S.N.R.; Salm, Cora ; Schmitz, Jurriaan.
Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors. Utrecht, The Netherlands: STW, 2009. p. 81-84.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Materials selection for low temperature processed high Q resonators using ashby approach

AU - Kazmi, S.N.R.

AU - Salm, Cora

AU - Schmitz, Jurriaan

N1 - Conference code: 12

PY - 2009/11/26

Y1 - 2009/11/26

N2 - MicroElectroMechanical Systems (MEMS) is an emerging class of microfabrication technology that can truly be anticipated as an enabling technology for future radio frequency (RF) communications. This work focuses on the material selection using the Ashby approach for the high-Q resonators that need to be monolithically post processed on top of CMOS chip conforming to the requirement of thermal budget, stress and plasma induced damages for post processing.

AB - MicroElectroMechanical Systems (MEMS) is an emerging class of microfabrication technology that can truly be anticipated as an enabling technology for future radio frequency (RF) communications. This work focuses on the material selection using the Ashby approach for the high-Q resonators that need to be monolithically post processed on top of CMOS chip conforming to the requirement of thermal budget, stress and plasma induced damages for post processing.

KW - METIS-264275

KW - Material selection

KW - IR-69060

KW - Post processing

KW - EWI-17072

KW - Radio frequency (RF)

KW - MEMS

KW - SC-ICF: Integrated Circuit Fabrication

KW - Resonators

M3 - Conference contribution

SN - 978-90-73461-62-8

SP - 81

EP - 84

BT - Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors

PB - STW

CY - Utrecht, The Netherlands

T2 - 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2009

Y2 - 26 November 2009 through 27 November 2009

ER -