MicroElectroMechanical Systems (MEMS) is an emerging class of microfabrication technology that can truly be anticipated as an enabling technology for future radio frequency (RF) communications. This work focuses on the material selection using the Ashby approach for the high-Q resonators that need to be monolithically post processed on top of CMOS chip conforming to the requirement of thermal budget, stress and plasma induced damages for post processing.
|Title of host publication||Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors|
|Place of Publication||Utrecht, The Netherlands|
|Number of pages||4|
|Publication status||Published - 26 Nov 2009|
|Event||12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2009 - Veldhoven, Netherlands|
Duration: 26 Nov 2009 → 27 Nov 2009
Conference number: 12
|Publisher||Technology Foundation STW|
|Conference||12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2009|
|Period||26/11/09 → 27/11/09|
- Material selection
- Post processing
- Radio frequency (RF)
- SC-ICF: Integrated Circuit Fabrication
Kazmi, S. N. R., Salm, C., & Schmitz, J. (2009). Materials selection for low temperature processed high Q resonators using ashby approach. In Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (pp. 81-84). Utrecht, The Netherlands: STW.