Materials selection for low temperature processed high Q resonators using ashby approach

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    Abstract

    MicroElectroMechanical Systems (MEMS) is an emerging class of microfabrication technology that can truly be anticipated as an enabling technology for future radio frequency (RF) communications. This work focuses on the material selection using the Ashby approach for the high-Q resonators that need to be monolithically post processed on top of CMOS chip conforming to the requirement of thermal budget, stress and plasma induced damages for post processing.
    Original languageUndefined
    Title of host publicationProceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors
    Place of PublicationUtrecht, The Netherlands
    PublisherSTW
    Pages81-84
    Number of pages4
    ISBN (Print)978-90-73461-62-8
    Publication statusPublished - 26 Nov 2009
    Event12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2009 - Veldhoven, Netherlands
    Duration: 26 Nov 200927 Nov 2009
    Conference number: 12

    Publication series

    Name
    PublisherTechnology Foundation STW

    Conference

    Conference12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2009
    Abbreviated titleSAFE
    CountryNetherlands
    CityVeldhoven
    Period26/11/0927/11/09

    Keywords

    • METIS-264275
    • Material selection
    • IR-69060
    • Post processing
    • EWI-17072
    • Radio frequency (RF)
    • MEMS
    • SC-ICF: Integrated Circuit Fabrication
    • Resonators

    Cite this

    Kazmi, S. N. R., Salm, C., & Schmitz, J. (2009). Materials selection for low temperature processed high Q resonators using ashby approach. In Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (pp. 81-84). Utrecht, The Netherlands: STW.