Measurement concepts: from classical transducers to new MEMS

Research output: Contribution to journalArticleAcademicpeer-review

6 Citations (Scopus)

Abstract

In this paper a formalization of the measurement concept (mc) is presented. Based on this formalization, a classical measurement concept (cmc) supported by classical transducers is derived. Restrictions and inconveniences of the cmc are exposed when the evaluation of more characteristics is concerned (the so-called multi-measurement process). Using a new measurement concept (nmc) developed in this work, the main drawbacks of the cmc can be removed. The core of the nmc is an actuator–sensor structure. Some basic principles regarding the design of this new structure as a MicroElectroMechanical System (MEMS) are also mentioned. Developing a state-space representation of the classical transducer and the new structure, the practical implementations of both concepts are compared and the superiority of the nmc is proven. Finally, the nmc is illustrated with an example concerning the determination of fluid and flow parameters using MEMS.
Original languageUndefined
Pages (from-to)159-178
JournalMeasurement : journal of the International Measurement Confederation (Ned.)
Volume27
Issue number3
DOIs
Publication statusPublished - 2000

Keywords

  • Transducer
  • MEMS
  • Measurement concept
  • Actuator–sensor structure
  • IR-67914
  • METIS-112396

Cite this

@article{e3f12de8cae744429d35dec2175ab71d,
title = "Measurement concepts: from classical transducers to new MEMS",
abstract = "In this paper a formalization of the measurement concept (mc) is presented. Based on this formalization, a classical measurement concept (cmc) supported by classical transducers is derived. Restrictions and inconveniences of the cmc are exposed when the evaluation of more characteristics is concerned (the so-called multi-measurement process). Using a new measurement concept (nmc) developed in this work, the main drawbacks of the cmc can be removed. The core of the nmc is an actuator–sensor structure. Some basic principles regarding the design of this new structure as a MicroElectroMechanical System (MEMS) are also mentioned. Developing a state-space representation of the classical transducer and the new structure, the practical implementations of both concepts are compared and the superiority of the nmc is proven. Finally, the nmc is illustrated with an example concerning the determination of fluid and flow parameters using MEMS.",
keywords = "Transducer, MEMS, Measurement concept, Actuator–sensor structure, IR-67914, METIS-112396",
author = "N. Damean and Regtien, {Paulus P.L.}",
year = "2000",
doi = "10.1016/S0263-2241(99)00057-3",
language = "Undefined",
volume = "27",
pages = "159--178",
journal = "Measurement : journal of the International Measurement Confederation (Ned.)",
issn = "0263-2241",
publisher = "Elsevier",
number = "3",

}

Measurement concepts: from classical transducers to new MEMS. / Damean, N.; Regtien, Paulus P.L.

In: Measurement : journal of the International Measurement Confederation (Ned.), Vol. 27, No. 3, 2000, p. 159-178.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - Measurement concepts: from classical transducers to new MEMS

AU - Damean, N.

AU - Regtien, Paulus P.L.

PY - 2000

Y1 - 2000

N2 - In this paper a formalization of the measurement concept (mc) is presented. Based on this formalization, a classical measurement concept (cmc) supported by classical transducers is derived. Restrictions and inconveniences of the cmc are exposed when the evaluation of more characteristics is concerned (the so-called multi-measurement process). Using a new measurement concept (nmc) developed in this work, the main drawbacks of the cmc can be removed. The core of the nmc is an actuator–sensor structure. Some basic principles regarding the design of this new structure as a MicroElectroMechanical System (MEMS) are also mentioned. Developing a state-space representation of the classical transducer and the new structure, the practical implementations of both concepts are compared and the superiority of the nmc is proven. Finally, the nmc is illustrated with an example concerning the determination of fluid and flow parameters using MEMS.

AB - In this paper a formalization of the measurement concept (mc) is presented. Based on this formalization, a classical measurement concept (cmc) supported by classical transducers is derived. Restrictions and inconveniences of the cmc are exposed when the evaluation of more characteristics is concerned (the so-called multi-measurement process). Using a new measurement concept (nmc) developed in this work, the main drawbacks of the cmc can be removed. The core of the nmc is an actuator–sensor structure. Some basic principles regarding the design of this new structure as a MicroElectroMechanical System (MEMS) are also mentioned. Developing a state-space representation of the classical transducer and the new structure, the practical implementations of both concepts are compared and the superiority of the nmc is proven. Finally, the nmc is illustrated with an example concerning the determination of fluid and flow parameters using MEMS.

KW - Transducer

KW - MEMS

KW - Measurement concept

KW - Actuator–sensor structure

KW - IR-67914

KW - METIS-112396

U2 - 10.1016/S0263-2241(99)00057-3

DO - 10.1016/S0263-2241(99)00057-3

M3 - Article

VL - 27

SP - 159

EP - 178

JO - Measurement : journal of the International Measurement Confederation (Ned.)

JF - Measurement : journal of the International Measurement Confederation (Ned.)

SN - 0263-2241

IS - 3

ER -