Measurement concepts: from classical transducers to new MEMS

    Research output: Contribution to journalArticleAcademicpeer-review

    6 Citations (Scopus)

    Abstract

    In this paper a formalization of the measurement concept (mc) is presented. Based on this formalization, a classical measurement concept (cmc) supported by classical transducers is derived. Restrictions and inconveniences of the cmc are exposed when the evaluation of more characteristics is concerned (the so-called multi-measurement process). Using a new measurement concept (nmc) developed in this work, the main drawbacks of the cmc can be removed. The core of the nmc is an actuator–sensor structure. Some basic principles regarding the design of this new structure as a MicroElectroMechanical System (MEMS) are also mentioned. Developing a state-space representation of the classical transducer and the new structure, the practical implementations of both concepts are compared and the superiority of the nmc is proven. Finally, the nmc is illustrated with an example concerning the determination of fluid and flow parameters using MEMS.
    Original languageUndefined
    Pages (from-to)159-178
    JournalMeasurement : journal of the International Measurement Confederation (Ned.)
    Volume27
    Issue number3
    DOIs
    Publication statusPublished - 2000

    Keywords

    • Transducer
    • MEMS
    • Measurement concept
    • Actuator–sensor structure
    • IR-67914
    • METIS-112396

    Cite this

    @article{e3f12de8cae744429d35dec2175ab71d,
    title = "Measurement concepts: from classical transducers to new MEMS",
    abstract = "In this paper a formalization of the measurement concept (mc) is presented. Based on this formalization, a classical measurement concept (cmc) supported by classical transducers is derived. Restrictions and inconveniences of the cmc are exposed when the evaluation of more characteristics is concerned (the so-called multi-measurement process). Using a new measurement concept (nmc) developed in this work, the main drawbacks of the cmc can be removed. The core of the nmc is an actuator–sensor structure. Some basic principles regarding the design of this new structure as a MicroElectroMechanical System (MEMS) are also mentioned. Developing a state-space representation of the classical transducer and the new structure, the practical implementations of both concepts are compared and the superiority of the nmc is proven. Finally, the nmc is illustrated with an example concerning the determination of fluid and flow parameters using MEMS.",
    keywords = "Transducer, MEMS, Measurement concept, Actuator–sensor structure, IR-67914, METIS-112396",
    author = "N. Damean and Regtien, {Paulus P.L.}",
    year = "2000",
    doi = "10.1016/S0263-2241(99)00057-3",
    language = "Undefined",
    volume = "27",
    pages = "159--178",
    journal = "Measurement : journal of the International Measurement Confederation (Ned.)",
    issn = "0263-2241",
    publisher = "Elsevier",
    number = "3",

    }

    Measurement concepts: from classical transducers to new MEMS. / Damean, N.; Regtien, Paulus P.L.

    In: Measurement : journal of the International Measurement Confederation (Ned.), Vol. 27, No. 3, 2000, p. 159-178.

    Research output: Contribution to journalArticleAcademicpeer-review

    TY - JOUR

    T1 - Measurement concepts: from classical transducers to new MEMS

    AU - Damean, N.

    AU - Regtien, Paulus P.L.

    PY - 2000

    Y1 - 2000

    N2 - In this paper a formalization of the measurement concept (mc) is presented. Based on this formalization, a classical measurement concept (cmc) supported by classical transducers is derived. Restrictions and inconveniences of the cmc are exposed when the evaluation of more characteristics is concerned (the so-called multi-measurement process). Using a new measurement concept (nmc) developed in this work, the main drawbacks of the cmc can be removed. The core of the nmc is an actuator–sensor structure. Some basic principles regarding the design of this new structure as a MicroElectroMechanical System (MEMS) are also mentioned. Developing a state-space representation of the classical transducer and the new structure, the practical implementations of both concepts are compared and the superiority of the nmc is proven. Finally, the nmc is illustrated with an example concerning the determination of fluid and flow parameters using MEMS.

    AB - In this paper a formalization of the measurement concept (mc) is presented. Based on this formalization, a classical measurement concept (cmc) supported by classical transducers is derived. Restrictions and inconveniences of the cmc are exposed when the evaluation of more characteristics is concerned (the so-called multi-measurement process). Using a new measurement concept (nmc) developed in this work, the main drawbacks of the cmc can be removed. The core of the nmc is an actuator–sensor structure. Some basic principles regarding the design of this new structure as a MicroElectroMechanical System (MEMS) are also mentioned. Developing a state-space representation of the classical transducer and the new structure, the practical implementations of both concepts are compared and the superiority of the nmc is proven. Finally, the nmc is illustrated with an example concerning the determination of fluid and flow parameters using MEMS.

    KW - Transducer

    KW - MEMS

    KW - Measurement concept

    KW - Actuator–sensor structure

    KW - IR-67914

    KW - METIS-112396

    U2 - 10.1016/S0263-2241(99)00057-3

    DO - 10.1016/S0263-2241(99)00057-3

    M3 - Article

    VL - 27

    SP - 159

    EP - 178

    JO - Measurement : journal of the International Measurement Confederation (Ned.)

    JF - Measurement : journal of the International Measurement Confederation (Ned.)

    SN - 0263-2241

    IS - 3

    ER -