Measurement of reaction heats using a polysilicon-based microcalorimetric sensor

E. Vereshchagina; Robertus A.M. Wolters; Johannes G.E. Gardeniers

doi:10.1016/j.sna.2011.02.010

Measurement of reaction heats using a polysilicon-based microcalorimetric sensor

E. Vereshchagina, Robertus A.M. Wolters, Johannes G.E. Gardeniers

Mesoscale Chemical Systems

Research output: Contribution to journal › Article › Academic › peer-review

17 Citations (Scopus)

9 Downloads (Pure)

Abstract

In this work we present a low-cost, low-power, small sample volume microcalorimetric sensor for the measurement of reaction heats. The polysilicon-based microcalorimetric sensor combines several advantages: (i) complementary metal oxide semiconductor technology (CMOS) for future integration; (ii) elements of silicon micromachining (MEMS) to control thermal performance; (iii) heterogeneous catalysts for selective detection and analysis of individual gas compounds; and (iv) microfluidics for optimized control over the reaction conditions.

Original language	English
Pages (from-to)	308-316
Number of pages	9
Journal	Sensors and Actuators A: Physical
Volume	169
Issue number	2
DOIs	https://doi.org/10.1016/j.sna.2011.02.010
Publication status	Published - 1 Oct 2011

Keywords

Oxidation of alkanes
Hot-plate
Microcalorimeter
Gas sensor
IR-79490
Catalyst
EWI-21352
METIS-280289

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1016/j.sna.2011.02.010

http://eprints.eemcs.utwente.nl/secure2/21352/01/wolters_s_a.pdf

Cite this

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title = "Measurement of reaction heats using a polysilicon-based microcalorimetric sensor",

abstract = "In this work we present a low-cost, low-power, small sample volume microcalorimetric sensor for the measurement of reaction heats. The polysilicon-based microcalorimetric sensor combines several advantages: (i) complementary metal oxide semiconductor technology (CMOS) for future integration; (ii) elements of silicon micromachining (MEMS) to control thermal performance; (iii) heterogeneous catalysts for selective detection and analysis of individual gas compounds; and (iv) microfluidics for optimized control over the reaction conditions.",

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T1 - Measurement of reaction heats using a polysilicon-based microcalorimetric sensor

AU - Vereshchagina, E.

AU - Wolters, Robertus A.M.

AU - Gardeniers, Johannes G.E.

PY - 2011/10/1

Y1 - 2011/10/1

N2 - In this work we present a low-cost, low-power, small sample volume microcalorimetric sensor for the measurement of reaction heats. The polysilicon-based microcalorimetric sensor combines several advantages: (i) complementary metal oxide semiconductor technology (CMOS) for future integration; (ii) elements of silicon micromachining (MEMS) to control thermal performance; (iii) heterogeneous catalysts for selective detection and analysis of individual gas compounds; and (iv) microfluidics for optimized control over the reaction conditions.

AB - In this work we present a low-cost, low-power, small sample volume microcalorimetric sensor for the measurement of reaction heats. The polysilicon-based microcalorimetric sensor combines several advantages: (i) complementary metal oxide semiconductor technology (CMOS) for future integration; (ii) elements of silicon micromachining (MEMS) to control thermal performance; (iii) heterogeneous catalysts for selective detection and analysis of individual gas compounds; and (iv) microfluidics for optimized control over the reaction conditions.

KW - Oxidation of alkanes

KW - Hot-plate

KW - Microcalorimeter

KW - Gas sensor

KW - IR-79490

KW - Catalyst

KW - EWI-21352

KW - METIS-280289

U2 - 10.1016/j.sna.2011.02.010

DO - 10.1016/j.sna.2011.02.010

M3 - Article

SN - 0924-4247

VL - 169

SP - 308

EP - 316

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

IS - 2

ER -

Measurement of reaction heats using a polysilicon-based microcalorimetric sensor

Abstract

Keywords

UN SDGs

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