Measurement of reaction heats using a polysilicon-based microcalorimetric sensor

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Abstract

In this work we present a low-cost, low-power, small sample volume microcalorimetric sensor for the measurement of reaction heats. The polysilicon-based microcalorimetric sensor combines several advantages: (i) complementary metal oxide semiconductor technology (CMOS) for future integration; (ii) elements of silicon micromachining (MEMS) to control thermal performance; (iii) heterogeneous catalysts for selective detection and analysis of individual gas compounds; and (iv) microfluidics for optimized control over the reaction conditions.
Original languageEnglish
Pages (from-to)308-316
Number of pages9
JournalSensors and actuators. A: Physical
Volume169
Issue number2
DOIs
Publication statusPublished - 1 Oct 2011

Keywords

  • Oxidation of alkanes
  • Hot-plate
  • Microcalorimeter
  • Gas sensor
  • IR-79490
  • Catalyst
  • EWI-21352
  • METIS-280289

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