Measurement of the sputter yield after mild ion erosion of a pristine Cu(001) surface

F.G. Stoian, Raoul van Gastel, Herbert Wormeester, Bene Poelsema

Research output: Contribution to journalArticleAcademicpeer-review

2 Citations (Scopus)

Abstract

Using the STM technique we have determined the sputter yield on a pristine Cu(001) surface after mild (fluence less than 0.044 ions per surface atom) bombardment of the pristine surface with 800 eV Ar+ions at normal incidence. The experiments have been performed at substrate temperatures ranging from 200 to 350 K. Making use of the positional correlation of adatoms and surface vacancies, at 200 K and 325 K, we concluded that about 1/3 of the surface adatoms originate from interstitials arriving at the surface and they give a direct indication of the buried bulk vacancies. A careful analysis of the different areas for surface vacancies and adatom then allowed a quantitative evaluation of the sputter yield at 1.2 Cu atoms per 800 eV Ar+ ion
Original languageEnglish
Pages (from-to)1618-1622
Number of pages5
JournalSurface science
Volume606
Issue number21-22
DOIs
Publication statusPublished - 2012

Keywords

  • METIS-287533
  • Optics (see also 3311)Solid state physics (see also 2307)Niet in een andere rubriek onder te brengen
  • IR-81157

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