Abstract
| Original language | Undefined |
|---|---|
| Article number | 10.1088/0960-1317/20/6/064005 |
| Pages (from-to) | 064005 |
| Number of pages | 6 |
| Journal | Journal of micromechanics and microengineering |
| Volume | 20 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - 1 Jun 2010 |
Keywords
- METIS-270840
- IR-72136
- EWI-17970
Cite this
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Measurement setup for detecting the Casimir force between parallel plates separated at a sub-micron distance. / Syed Nawazuddin, M.B.; Lammerink, Theodorus S.J.; Wiegerink, Remco J.; Elwenspoek, Michael Curt.
In: Journal of micromechanics and microengineering, Vol. 20, No. 6, 10.1088/0960-1317/20/6/064005, 01.06.2010, p. 064005.Research output: Contribution to journal › Article › Academic › peer-review
TY - JOUR
T1 - Measurement setup for detecting the Casimir force between parallel plates separated at a sub-micron distance
AU - Syed Nawazuddin, M.B.
AU - Lammerink, Theodorus S.J.
AU - Wiegerink, Remco J.
AU - Elwenspoek, Michael Curt
N1 - 10.1088/0960-1317/20/6/064005
PY - 2010/6/1
Y1 - 2010/6/1
N2 - In microelectromechanical systems (MEMS), parallel plate structures with sub-micron separation have been of much use in various types of sensors and actuators. As the separation distance in these devices reaches down to hundreds of nm, it gets difficult to control the gap due to parasitic charging and the Casimir force. The Casimir force and its dependence on the boundary conditions of electromagnetic fields is a phenomenon that is mostly avoided rather than explored. In this paper, we present a methodology involving a micromachined parallel-plate geometry to measure the Casimir force at sub-micron separation. The new feature in this setup is the micromechanical means of parallelism control to measure the force at extremely small separation distances. A fabrication process for the micromachined parallel-plate structure is also given.
AB - In microelectromechanical systems (MEMS), parallel plate structures with sub-micron separation have been of much use in various types of sensors and actuators. As the separation distance in these devices reaches down to hundreds of nm, it gets difficult to control the gap due to parasitic charging and the Casimir force. The Casimir force and its dependence on the boundary conditions of electromagnetic fields is a phenomenon that is mostly avoided rather than explored. In this paper, we present a methodology involving a micromachined parallel-plate geometry to measure the Casimir force at sub-micron separation. The new feature in this setup is the micromechanical means of parallelism control to measure the force at extremely small separation distances. A fabrication process for the micromachined parallel-plate structure is also given.
KW - METIS-270840
KW - IR-72136
KW - EWI-17970
U2 - 10.1088/0960-1317/20/6/064005
DO - 10.1088/0960-1317/20/6/064005
M3 - Article
VL - 20
SP - 064005
JO - Journal of micromechanics and microengineering
JF - Journal of micromechanics and microengineering
SN - 0960-1317
IS - 6
M1 - 10.1088/0960-1317/20/6/064005
ER -