Measuring conductivity, temperature and hydrogen peroxide concentration using a single sensor structure

G.R. Langereis, Wouter Olthuis, Piet Bergveld

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    Abstract

    Using a single multi purpose sensor structure, consisting of metal films on a substrate only, three electrolyte parameters have been measured. The parameters are temperature, conductivity and hydrogen peroxide concentration, where the latter one represents one example of many species that can be determined amperometrically. The active area of the fabricated devices is about 1 mm2
    Original languageUndefined
    Title of host publicationTransducers '97
    Place of PublicationChicago, USA
    PublisherIEEE
    Pages543-546
    ISBN (Print)0-7803-3829-4
    DOIs
    Publication statusPublished - 17 Jun 1997
    Event1997 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1997 - Chicago, United States
    Duration: 16 Jun 199719 Jun 1997

    Publication series

    Name
    PublisherIEEE

    Conference

    Conference1997 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1997
    Abbreviated titleTRANSDUCERS 97
    Country/TerritoryUnited States
    CityChicago
    Period16/06/9719/06/97

    Keywords

    • IR-16877
    • METIS-113762

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