Mechanical decoupling zones for package-stress reduction in micromechanical sensors

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	269-271
Publication status	Published - 11 Mar 1992
Event	Sensortechnologie Conferentie & Workshop 1992: (STW Workshop Sensor Technology) - Koningshof, Veldhoven, Netherlands Duration: 11 Mar 1992 → 12 Mar 1992

Conference	Sensortechnologie Conferentie & Workshop 1992
Country/Territory	Netherlands
City	Veldhoven
Period	11/03/92 → 12/03/92

Keywords

@conference{3199224bb2c4499a98537133e4ce82c8,

title = "Mechanical decoupling zones for package-stress reduction in micromechanical sensors",

keywords = "METIS-133512",

author = "V.L. Spiering",

year = "1992",

month = mar,

day = "11",

language = "Undefined",

pages = "269--271",

note = "Sensortechnologie Conferentie \& Workshop 1992 ; Conference date: 11-03-1992 Through 12-03-1992",

}