Mechanical microsensors

Michael Curt Elwenspoek, Remco J. Wiegerink

Research output: Book/Report › Book › Academic

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Name	Microtechnology and MEMS, ISSN 1615-8326
Publisher	Springer Verlag

Keywords

@book{98eadd2e8c744e3e8b37f77e976bf928,

title = "Mechanical microsensors",

keywords = "METIS-112441, IR-41743",

author = "Elwenspoek, {Michael Curt} and Wiegerink, {Remco J.}",

year = "2001",

language = "Undefined",

isbn = "3540675825",

series = "Microtechnology and MEMS, ISSN 1615-8326",

publisher = "Springer",

address = "Netherlands",

}