Mechanical microsensors

Michael Curt Elwenspoek, Remco J. Wiegerink

Research output: Book/Report › Book › Academic

46 Downloads (Pure)
Original languageUndefined
Place of PublicationGermany
PublisherSpringer
Number of pages295
ISBN (Print)3540675825
Publication statusPublished - 2001

Publication series

NameMicrotechnology and MEMS, ISSN 1615-8326
PublisherSpringer Verlag

Keywords

  • METIS-112441
  • IR-41743

Cite this

Elwenspoek, M. C., & Wiegerink, R. J. (2001). Mechanical microsensors. (Microtechnology and MEMS, ISSN 1615-8326). Germany: Springer.
Elwenspoek, Michael Curt ; Wiegerink, Remco J. / Mechanical microsensors. Germany : Springer, 2001. 295 p. (Microtechnology and MEMS, ISSN 1615-8326).
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author = "Elwenspoek, {Michael Curt} and Wiegerink, {Remco J.}",
year = "2001",
language = "Undefined",
isbn = "3540675825",
series = "Microtechnology and MEMS, ISSN 1615-8326",
publisher = "Springer",

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Elwenspoek, MC & Wiegerink, RJ 2001, Mechanical microsensors. Microtechnology and MEMS, ISSN 1615-8326, Springer, Germany.

Mechanical microsensors. / Elwenspoek, Michael Curt; Wiegerink, Remco J.

Germany : Springer, 2001. 295 p. (Microtechnology and MEMS, ISSN 1615-8326).

Research output: Book/Report › Book › Academic

TY - BOOK

T1 - Mechanical microsensors

AU - Elwenspoek, Michael Curt

AU - Wiegerink, Remco J.

PY - 2001

Y1 - 2001

KW - METIS-112441

KW - IR-41743

M3 - Book

SN - 3540675825

T3 - Microtechnology and MEMS, ISSN 1615-8326

BT - Mechanical microsensors

PB - Springer

CY - Germany

ER -

Elwenspoek MC, Wiegerink RJ. Mechanical microsensors. Germany: Springer, 2001. 295 p. (Microtechnology and MEMS, ISSN 1615-8326).

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