Original language | Undefined |
---|---|
Place of Publication | Germany |
Publisher | Springer |
Number of pages | 295 |
ISBN (Print) | 3540675825 |
Publication status | Published - 2001 |
Publication series
Name | Microtechnology and MEMS, ISSN 1615-8326 |
---|---|
Publisher | Springer Verlag |
Keywords
- METIS-112441
- IR-41743