| Original language | Undefined |
|---|---|
| Place of Publication | Germany |
| Publisher | Springer |
| Number of pages | 295 |
| ISBN (Print) | 3540675825 |
| Publication status | Published - 2001 |
Publication series
| Name | Microtechnology and MEMS, ISSN 1615-8326 |
|---|---|
| Publisher | Springer Verlag |
Keywords
- METIS-112441
- IR-41743