Mechanical microsensors

Michael Curt Elwenspoek, Remco J. Wiegerink

    Research output: Book/ReportBookAcademic

    78 Downloads (Pure)
    Original languageUndefined
    Place of PublicationGermany
    PublisherSpringer
    Number of pages295
    ISBN (Print)3540675825
    Publication statusPublished - 2001

    Publication series

    NameMicrotechnology and MEMS, ISSN 1615-8326
    PublisherSpringer Verlag

    Keywords

    • METIS-112441
    • IR-41743

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