Mechanical microsensors

Michael Curt Elwenspoek, Remco J. Wiegerink

    Research output: Book/ReportBookAcademic

    58 Downloads (Pure)
    Original languageUndefined
    Place of PublicationGermany
    PublisherSpringer
    Number of pages295
    ISBN (Print)3540675825
    Publication statusPublished - 2001

    Publication series

    NameMicrotechnology and MEMS, ISSN 1615-8326
    PublisherSpringer Verlag

    Keywords

    • METIS-112441
    • IR-41743

    Cite this

    Elwenspoek, M. C., & Wiegerink, R. J. (2001). Mechanical microsensors. (Microtechnology and MEMS, ISSN 1615-8326). Germany: Springer.