Mechanical parameter extraction using resonant structures

J. Elders, H.A.C. Tilmans, S. Bouwstra, M. Elwenspoek

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    Abstract

    In order to model and design micromechanical sensors and actuators, it is of crucial importance that thin film mechanical parameters, such as the Young's modulus and the residual stress, are known. In this paper, the parameter extraction method using resonant structures have been used to obtain these data and has been compared with the bulge test. Circular aluminum diaphragms have been used as samples
    Original languageEnglish
    Pages (from-to)171-176
    Number of pages6
    JournalMaterials Research Society symposia proceedings
    Volume308
    DOIs
    Publication statusPublished - 12 Apr 1993
    EventMRS Spring Meeting 1993 - San Fransisco, United States
    Duration: 12 Apr 199316 Apr 1993

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