Mechanical parameter extraction using resonant structures

J. Elders; H.A.C. Tilmans; S. Bouwstra; M. Elwenspoek

doi:10.1557/PROC-308-171

Mechanical parameter extraction using resonant structures

J. Elders, H.A.C. Tilmans, S. Bouwstra, M. Elwenspoek

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Abstract

In order to model and design micromechanical sensors and actuators, it is of crucial importance that thin film mechanical parameters, such as the Young's modulus and the residual stress, are known. In this paper, the parameter extraction method using resonant structures have been used to obtain these data and has been compared with the bulge test. Circular aluminum diaphragms have been used as samples

Original language	English
Pages (from-to)	171-176
Number of pages	6
Journal	Materials Research Society symposia proceedings
Volume	308
DOIs	https://doi.org/10.1557/PROC-308-171
Publication status	Published - 12 Apr 1993
Event	MRS Spring Meeting 1993 - San Fransisco, United States Duration: 12 Apr 1993 → 16 Apr 1993

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title = "Mechanical parameter extraction using resonant structures",

abstract = "In order to model and design micromechanical sensors and actuators, it is of crucial importance that thin film mechanical parameters, such as the Young's modulus and the residual stress, are known. In this paper, the parameter extraction method using resonant structures have been used to obtain these data and has been compared with the bulge test. Circular aluminum diaphragms have been used as samples",

author = "J. Elders and H.A.C. Tilmans and S. Bouwstra and M. Elwenspoek",

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AU - Bouwstra, S.

AU - Elwenspoek, M.

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AB - In order to model and design micromechanical sensors and actuators, it is of crucial importance that thin film mechanical parameters, such as the Young's modulus and the residual stress, are known. In this paper, the parameter extraction method using resonant structures have been used to obtain these data and has been compared with the bulge test. Circular aluminum diaphragms have been used as samples

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DO - 10.1557/PROC-308-171

M3 - Article

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JO - Materials Research Society symposia proceedings

JF - Materials Research Society symposia proceedings

T2 - MRS Spring Meeting 1993

Y2 - 12 April 1993 through 16 April 1993

ER -

Mechanical parameter extraction using resonant structures

Abstract

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