Mechanical parameter extraction using resonant structures

J. Elders, H.A.C. Tilmans, S. Bouwstra, M.C. Elwenspoek

    Research output: Contribution to conference › Poster › Other research output

    1 Citation (Scopus)
    Original languageEnglish
    Publication statusPublished - 12 Apr 1993
    EventMRS Spring Meeting 1993 - San Fransisco, United States
    Duration: 12 Apr 1993 → 16 Apr 1993

    Conference

    ConferenceMRS Spring Meeting 1993
    CountryUnited States
    CitySan Fransisco
    Period12/04/93 → 16/04/93

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