Mechanical properties of polycrystalline metal silicide thin films

Airat Shafikov, Robbert W.E. van de Kruijs (Contributor), Bart Schurink (Contributor), J.P.H. Benschop (Contributor), F. Bijkerk (Contributor)

Research output: Contribution to conference › Poster › Academic

Original language	English
Publication status	Published - 21 Jan 2020
Event	Physics@Veldhoven 2020 - veldhoven, Netherlands Duration: 21 Jan 2020 → 22 Jan 2020

Cite this

@conference{c7113e08ed1a4e5bbfe8ce5d26112763,

title = "Mechanical properties of polycrystalline metal silicide thin films",

author = "Airat Shafikov and {van de Kruijs}, {Robbert W.E.} and Bart Schurink and J.P.H. Benschop and F. Bijkerk",

year = "2020",

month = jan,

day = "21",

language = "English",

note = "Physics@Veldhoven 2020 ; Conference date: 21-01-2020 Through 22-01-2020",

}