Mechanical resonators on CMOS for integrated passive band pass filters

S. N.R. Kazmi, C. Salm, J. Schmitz

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

We present CMOS post-processing compatible resonator structures for passive band-pass filtering in the MHz-few GHz range. This article discusses the considerations leading to the choice of materials and process sequence, practical aspects in the fabrication, and resonator performance. Using in-situ boron-doped polycrystalline germanium-silicon as resonator and electrode material, high quality factors over 200,000 are obtained at relatively low motional impedance.

Original languageEnglish
Title of host publicationULIS 2013
Subtitle of host publicationThe 14th International Conference on Ultimate Integration on Silicon, Incorporating the 'Technology Briefing Day'
Pages193-196
Number of pages4
DOIs
Publication statusPublished - 23 Jul 2013
Event14th International Conference on Ultimate Integration on Silicon, ULIS 2013 - Coventry, United Kingdom
Duration: 19 Mar 201321 Mar 2013
Conference number: 14

Publication series

NameULIS 2013: The 14th International Conference on Ultimate Integration on Silicon, Incorporating the 'Technology Briefing Day'

Conference

Conference14th International Conference on Ultimate Integration on Silicon, ULIS 2013
Abbreviated titleULIS 2013
CountryUnited Kingdom
CityCoventry
Period19/03/1321/03/13

Fingerprint

Passive filters
Bandpass filters
Resonators
Germanium
Boron
Fabrication
Silicon
Electrodes
Processing

Keywords

  • above-IC
  • CMOS
  • filter
  • germanium
  • GeSi
  • Lamé mode
  • MEMS
  • microtechnology
  • resonator
  • SiGe
  • silicon
  • software defined radio

Cite this

Kazmi, S. N. R., Salm, C., & Schmitz, J. (2013). Mechanical resonators on CMOS for integrated passive band pass filters. In ULIS 2013: The 14th International Conference on Ultimate Integration on Silicon, Incorporating the 'Technology Briefing Day' (pp. 193-196). [6523517] (ULIS 2013: The 14th International Conference on Ultimate Integration on Silicon, Incorporating the 'Technology Briefing Day'). https://doi.org/10.1109/ULIS.2013.6523517
Kazmi, S. N.R. ; Salm, C. ; Schmitz, J. / Mechanical resonators on CMOS for integrated passive band pass filters. ULIS 2013: The 14th International Conference on Ultimate Integration on Silicon, Incorporating the 'Technology Briefing Day'. 2013. pp. 193-196 (ULIS 2013: The 14th International Conference on Ultimate Integration on Silicon, Incorporating the 'Technology Briefing Day').
@inproceedings{449259ac27424d89819e1e7099d12969,
title = "Mechanical resonators on CMOS for integrated passive band pass filters",
abstract = "We present CMOS post-processing compatible resonator structures for passive band-pass filtering in the MHz-few GHz range. This article discusses the considerations leading to the choice of materials and process sequence, practical aspects in the fabrication, and resonator performance. Using in-situ boron-doped polycrystalline germanium-silicon as resonator and electrode material, high quality factors over 200,000 are obtained at relatively low motional impedance.",
keywords = "above-IC, CMOS, filter, germanium, GeSi, Lam{\'e} mode, MEMS, microtechnology, resonator, SiGe, silicon, software defined radio",
author = "Kazmi, {S. N.R.} and C. Salm and J. Schmitz",
year = "2013",
month = "7",
day = "23",
doi = "10.1109/ULIS.2013.6523517",
language = "English",
isbn = "9781467348003",
series = "ULIS 2013: The 14th International Conference on Ultimate Integration on Silicon, Incorporating the 'Technology Briefing Day'",
pages = "193--196",
booktitle = "ULIS 2013",

}

Kazmi, SNR, Salm, C & Schmitz, J 2013, Mechanical resonators on CMOS for integrated passive band pass filters. in ULIS 2013: The 14th International Conference on Ultimate Integration on Silicon, Incorporating the 'Technology Briefing Day'., 6523517, ULIS 2013: The 14th International Conference on Ultimate Integration on Silicon, Incorporating the 'Technology Briefing Day', pp. 193-196, 14th International Conference on Ultimate Integration on Silicon, ULIS 2013, Coventry, United Kingdom, 19/03/13. https://doi.org/10.1109/ULIS.2013.6523517

Mechanical resonators on CMOS for integrated passive band pass filters. / Kazmi, S. N.R.; Salm, C.; Schmitz, J.

ULIS 2013: The 14th International Conference on Ultimate Integration on Silicon, Incorporating the 'Technology Briefing Day'. 2013. p. 193-196 6523517 (ULIS 2013: The 14th International Conference on Ultimate Integration on Silicon, Incorporating the 'Technology Briefing Day').

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Mechanical resonators on CMOS for integrated passive band pass filters

AU - Kazmi, S. N.R.

AU - Salm, C.

AU - Schmitz, J.

PY - 2013/7/23

Y1 - 2013/7/23

N2 - We present CMOS post-processing compatible resonator structures for passive band-pass filtering in the MHz-few GHz range. This article discusses the considerations leading to the choice of materials and process sequence, practical aspects in the fabrication, and resonator performance. Using in-situ boron-doped polycrystalline germanium-silicon as resonator and electrode material, high quality factors over 200,000 are obtained at relatively low motional impedance.

AB - We present CMOS post-processing compatible resonator structures for passive band-pass filtering in the MHz-few GHz range. This article discusses the considerations leading to the choice of materials and process sequence, practical aspects in the fabrication, and resonator performance. Using in-situ boron-doped polycrystalline germanium-silicon as resonator and electrode material, high quality factors over 200,000 are obtained at relatively low motional impedance.

KW - above-IC

KW - CMOS

KW - filter

KW - germanium

KW - GeSi

KW - Lamé mode

KW - MEMS

KW - microtechnology

KW - resonator

KW - SiGe

KW - silicon

KW - software defined radio

UR - http://www.scopus.com/inward/record.url?scp=84880320750&partnerID=8YFLogxK

U2 - 10.1109/ULIS.2013.6523517

DO - 10.1109/ULIS.2013.6523517

M3 - Conference contribution

SN - 9781467348003

T3 - ULIS 2013: The 14th International Conference on Ultimate Integration on Silicon, Incorporating the 'Technology Briefing Day'

SP - 193

EP - 196

BT - ULIS 2013

ER -

Kazmi SNR, Salm C, Schmitz J. Mechanical resonators on CMOS for integrated passive band pass filters. In ULIS 2013: The 14th International Conference on Ultimate Integration on Silicon, Incorporating the 'Technology Briefing Day'. 2013. p. 193-196. 6523517. (ULIS 2013: The 14th International Conference on Ultimate Integration on Silicon, Incorporating the 'Technology Briefing Day'). https://doi.org/10.1109/ULIS.2013.6523517