Mechanical resonators on CMOS for integrated passive band pass filters

S. N.R. Kazmi, C. Salm, J. Schmitz

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Abstract

    We present CMOS post-processing compatible resonator structures for passive band-pass filtering in the MHz-few GHz range. This article discusses the considerations leading to the choice of materials and process sequence, practical aspects in the fabrication, and resonator performance. Using in-situ boron-doped polycrystalline germanium-silicon as resonator and electrode material, high quality factors over 200,000 are obtained at relatively low motional impedance.

    Original languageEnglish
    Title of host publicationULIS 2013
    Subtitle of host publicationThe 14th International Conference on Ultimate Integration on Silicon, Incorporating the 'Technology Briefing Day'
    Pages193-196
    Number of pages4
    DOIs
    Publication statusPublished - 23 Jul 2013
    Event14th International Conference on Ultimate Integration on Silicon, ULIS 2013 - Coventry, United Kingdom
    Duration: 19 Mar 201321 Mar 2013
    Conference number: 14

    Publication series

    NameULIS 2013: The 14th International Conference on Ultimate Integration on Silicon, Incorporating the 'Technology Briefing Day'

    Conference

    Conference14th International Conference on Ultimate Integration on Silicon, ULIS 2013
    Abbreviated titleULIS 2013
    CountryUnited Kingdom
    CityCoventry
    Period19/03/1321/03/13

    Keywords

    • above-IC
    • CMOS
    • filter
    • germanium
    • GeSi
    • Lamé mode
    • MEMS
    • microtechnology
    • resonator
    • SiGe
    • silicon
    • software defined radio

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  • Cite this

    Kazmi, S. N. R., Salm, C., & Schmitz, J. (2013). Mechanical resonators on CMOS for integrated passive band pass filters. In ULIS 2013: The 14th International Conference on Ultimate Integration on Silicon, Incorporating the 'Technology Briefing Day' (pp. 193-196). [6523517] (ULIS 2013: The 14th International Conference on Ultimate Integration on Silicon, Incorporating the 'Technology Briefing Day'). https://doi.org/10.1109/ULIS.2013.6523517