Mechanical tuning of optical race-track ring resonators

S.M. Chakkalakkal Abdulla, L.J. Kauppinen, Mindert Dijkstra, Marcel Dijkstra, Meint J. de Boer, Johan W. Berenschot, R.M. de Ridder, Gijsbertus J.M. Krijnen

    Research output: Contribution to journalArticleAcademicpeer-review

    1 Citation (Scopus)
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    Abstract

    This paper presents the fabrication and mechanical characterization of electrostatically actuated micro bimorphs integrated with race-track ring resonators, for optical tuning applications. The bimorphs, having an upward deflection in the off-state, are integrated by surface micromachining techniques with race-track ring resonators fabricated on Silicon On Insulator (SOI) wafers. Using electrostatic actuation, these bimorphs are pulled into the evanescent field of the ring resonator thereby modulating the propagation properties. Pull-in voltages of the bimorphs have been measured statically and the effect of electrostatic spring softening (ESS) on the resonance frequency has been measured dynamically. The resonance wavelength of the optical ring resonator could be tuned by 50 pm by applying an 8.5 V DC voltage to a 40 μm long bimorph, bringing it into close proximity of the ring resonator waveguide. To the best of our knowledge, this is the first experimental demonstration of tuning of race track ring resonators by integrated, electrostatically actuated bimorphs.
    Original languageEnglish
    Pages (from-to)424-427
    Number of pages4
    JournalProcedia engineering
    Volume5
    DOIs
    Publication statusPublished - 2010
    EventEurosensors XXIV 2010 - Linz, Austria
    Duration: 5 Sep 20108 Sep 2010

    Fingerprint

    Resonators
    Tuning
    Electrostatics
    Optical resonators
    Evanescent fields
    Surface micromachining
    Electric potential
    Waveguides
    Demonstrations
    Fabrication
    Silicon
    Wavelength

    Keywords

    • Electrostatic spring softening
    • EWI-18841
    • race-track resonator
    • Bimorph
    • METIS-279120
    • IR-75002
    • wavelength tuning

    Cite this

    Chakkalakkal Abdulla, S.M. ; Kauppinen, L.J. ; Dijkstra, Mindert ; Dijkstra, Marcel ; de Boer, Meint J. ; Berenschot, Johan W. ; de Ridder, R.M. ; Krijnen, Gijsbertus J.M. / Mechanical tuning of optical race-track ring resonators. In: Procedia engineering. 2010 ; Vol. 5. pp. 424-427.
    @article{d145e864172849bda6dd1f2294df7658,
    title = "Mechanical tuning of optical race-track ring resonators",
    abstract = "This paper presents the fabrication and mechanical characterization of electrostatically actuated micro bimorphs integrated with race-track ring resonators, for optical tuning applications. The bimorphs, having an upward deflection in the off-state, are integrated by surface micromachining techniques with race-track ring resonators fabricated on Silicon On Insulator (SOI) wafers. Using electrostatic actuation, these bimorphs are pulled into the evanescent field of the ring resonator thereby modulating the propagation properties. Pull-in voltages of the bimorphs have been measured statically and the effect of electrostatic spring softening (ESS) on the resonance frequency has been measured dynamically. The resonance wavelength of the optical ring resonator could be tuned by 50 pm by applying an 8.5 V DC voltage to a 40 μm long bimorph, bringing it into close proximity of the ring resonator waveguide. To the best of our knowledge, this is the first experimental demonstration of tuning of race track ring resonators by integrated, electrostatically actuated bimorphs.",
    keywords = "Electrostatic spring softening, EWI-18841, race-track resonator, Bimorph, METIS-279120, IR-75002, wavelength tuning",
    author = "{Chakkalakkal Abdulla}, S.M. and L.J. Kauppinen and Mindert Dijkstra and Marcel Dijkstra and {de Boer}, {Meint J.} and Berenschot, {Johan W.} and {de Ridder}, R.M. and Krijnen, {Gijsbertus J.M.}",
    year = "2010",
    doi = "10.1016/j.proeng.2010.09.137",
    language = "English",
    volume = "5",
    pages = "424--427",
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    issn = "1877-7058",
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    Chakkalakkal Abdulla, SM, Kauppinen, LJ, Dijkstra, M, Dijkstra, M, de Boer, MJ, Berenschot, JW, de Ridder, RM & Krijnen, GJM 2010, 'Mechanical tuning of optical race-track ring resonators', Procedia engineering, vol. 5, pp. 424-427. https://doi.org/10.1016/j.proeng.2010.09.137

    Mechanical tuning of optical race-track ring resonators. / Chakkalakkal Abdulla, S.M.; Kauppinen, L.J.; Dijkstra, Mindert; Dijkstra, Marcel; de Boer, Meint J.; Berenschot, Johan W.; de Ridder, R.M.; Krijnen, Gijsbertus J.M.

    In: Procedia engineering, Vol. 5, 2010, p. 424-427.

    Research output: Contribution to journalArticleAcademicpeer-review

    TY - JOUR

    T1 - Mechanical tuning of optical race-track ring resonators

    AU - Chakkalakkal Abdulla, S.M.

    AU - Kauppinen, L.J.

    AU - Dijkstra, Mindert

    AU - Dijkstra, Marcel

    AU - de Boer, Meint J.

    AU - Berenschot, Johan W.

    AU - de Ridder, R.M.

    AU - Krijnen, Gijsbertus J.M.

    PY - 2010

    Y1 - 2010

    N2 - This paper presents the fabrication and mechanical characterization of electrostatically actuated micro bimorphs integrated with race-track ring resonators, for optical tuning applications. The bimorphs, having an upward deflection in the off-state, are integrated by surface micromachining techniques with race-track ring resonators fabricated on Silicon On Insulator (SOI) wafers. Using electrostatic actuation, these bimorphs are pulled into the evanescent field of the ring resonator thereby modulating the propagation properties. Pull-in voltages of the bimorphs have been measured statically and the effect of electrostatic spring softening (ESS) on the resonance frequency has been measured dynamically. The resonance wavelength of the optical ring resonator could be tuned by 50 pm by applying an 8.5 V DC voltage to a 40 μm long bimorph, bringing it into close proximity of the ring resonator waveguide. To the best of our knowledge, this is the first experimental demonstration of tuning of race track ring resonators by integrated, electrostatically actuated bimorphs.

    AB - This paper presents the fabrication and mechanical characterization of electrostatically actuated micro bimorphs integrated with race-track ring resonators, for optical tuning applications. The bimorphs, having an upward deflection in the off-state, are integrated by surface micromachining techniques with race-track ring resonators fabricated on Silicon On Insulator (SOI) wafers. Using electrostatic actuation, these bimorphs are pulled into the evanescent field of the ring resonator thereby modulating the propagation properties. Pull-in voltages of the bimorphs have been measured statically and the effect of electrostatic spring softening (ESS) on the resonance frequency has been measured dynamically. The resonance wavelength of the optical ring resonator could be tuned by 50 pm by applying an 8.5 V DC voltage to a 40 μm long bimorph, bringing it into close proximity of the ring resonator waveguide. To the best of our knowledge, this is the first experimental demonstration of tuning of race track ring resonators by integrated, electrostatically actuated bimorphs.

    KW - Electrostatic spring softening

    KW - EWI-18841

    KW - race-track resonator

    KW - Bimorph

    KW - METIS-279120

    KW - IR-75002

    KW - wavelength tuning

    U2 - 10.1016/j.proeng.2010.09.137

    DO - 10.1016/j.proeng.2010.09.137

    M3 - Article

    VL - 5

    SP - 424

    EP - 427

    JO - Procedia engineering

    JF - Procedia engineering

    SN - 1877-7058

    ER -