Mechanism of the reaction of WF6 and Si

P.A.C. Groenen, J.G.A. Hoelscher, H.H. Brongersma

Research output: Contribution to journal › Article › Academic › peer-review

Keywords

@article{b5db86f572264f6ab2181c4ee418f6ca,

title = "Mechanism of the reaction of WF6 and Si",

keywords = "METIS-128984",

author = "P.A.C. Groenen and J.G.A. Hoelscher and H.H. Brongersma",

year = "1994",

language = "Undefined",

pages = "123--123",

journal = "Applied surface science",

issn = "0169-4332",

publisher = "Elsevier",

number = "78",

}