Mechano-optical switching in a mems integrated photonic crystal slab waveguide

S.M. Chakkalakkal Abdulla; L.J. Kauppinen; Mindert Dijkstra; Marcel Dijkstra; Johan W. Berenschot; Meint J. de Boer; R.M. de Ridder; Gijsbertus J.M. Krijnen

doi:10.1109/MEMSYS.2011.5734349

Mechano-optical switching in a mems integrated photonic crystal slab waveguide

S.M. Chakkalakkal Abdulla, L.J. Kauppinen, Mindert Dijkstra, Marcel Dijkstra, Johan W. Berenschot, Meint J. de Boer, R.M. de Ridder, Gijsbertus J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

10 Citations (Scopus)

Abstract

A photonic crystal slab waveguide (PhC-WG) with an integrated MEMS bimorph cantilever actuator has been successfully fabricated using deep UV lithography and surface micromaching techniques. The cantilever is equipped with tips that are self-aligned with respect to the holes of the PhC-WG such that on electrostatic actuation, with modest voltages of less than 10 V, these tips move into the holes. This provides electro-opto-mechanical modulation of light-transmission, up to 80%, for interaction lengths as short as 10 μm. The device is monolithically integrated and designed to operate in the C-band of the telecommunication wavelengths.

Original language	Undefined
Title of host publication	Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Place of Publication	USA
Publisher	IEEE
Pages	9-12
Number of pages	4
ISBN (Print)	978-1-4244-9633-4
DOIs	https://doi.org/10.1109/MEMSYS.2011.5734349
Publication status	Published - 23 Jan 2011
Event	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico Duration: 23 Jan 2011 → 27 Jan 2011 Conference number: 24

Publication series

Name
Publisher	IEEE Micro Electro Mechanical Systems

Conference

Conference	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Abbreviated title	MEMS
Country/Territory	Mexico
City	Cancun
Period	23/01/11 → 27/01/11

Keywords

METIS-279134
EWI-19561
IR-75916

Access to Document

10.1109/MEMSYS.2011.5734349

http://eprints.eemcs.utwente.nl/secure2/19561/01/Mechano-optical_switching_in_a_mems_-_shahina_-.pdf

Cite this

Chakkalakkal Abdulla, S. M., Kauppinen, L. J., Dijkstra, M., Dijkstra, M., Berenschot, J. W., de Boer, M. J., de Ridder, R. M., & Krijnen, G. J. M. (2011). Mechano-optical switching in a mems integrated photonic crystal slab waveguide. In Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 (pp. 9-12). IEEE. https://doi.org/10.1109/MEMSYS.2011.5734349

@inproceedings{226ab39463724a668579a913eb665688,

title = "Mechano-optical switching in a mems integrated photonic crystal slab waveguide",

abstract = "A photonic crystal slab waveguide (PhC-WG) with an integrated MEMS bimorph cantilever actuator has been successfully fabricated using deep UV lithography and surface micromaching techniques. The cantilever is equipped with tips that are self-aligned with respect to the holes of the PhC-WG such that on electrostatic actuation, with modest voltages of less than 10 V, these tips move into the holes. This provides electro-opto-mechanical modulation of light-transmission, up to 80%, for interaction lengths as short as 10 μm. The device is monolithically integrated and designed to operate in the C-band of the telecommunication wavelengths.",

keywords = "METIS-279134, EWI-19561, IR-75916",

author = "{Chakkalakkal Abdulla}, S.M. and L.J. Kauppinen and Mindert Dijkstra and Marcel Dijkstra and Berenschot, {Johan W.} and {de Boer}, {Meint J.} and {de Ridder}, R.M. and Krijnen, {Gijsbertus J.M.}",

note = "10.1109/MEMSYS.2011.5734349 ; 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 ; Conference date: 23-01-2011 Through 27-01-2011",

year = "2011",

month = jan,

day = "23",

doi = "10.1109/MEMSYS.2011.5734349",

language = "Undefined",

isbn = "978-1-4244-9633-4",

publisher = "IEEE",

pages = "9--12",

booktitle = "Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011",

address = "United States",

}

Chakkalakkal Abdulla, SM, Kauppinen, LJ, Dijkstra, M, Dijkstra, M, Berenschot, JW, de Boer, MJ, de Ridder, RM & Krijnen, GJM 2011, Mechano-optical switching in a mems integrated photonic crystal slab waveguide. in Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011. IEEE, USA, pp. 9-12, 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, Cancun, Mexico, 23/01/11. https://doi.org/10.1109/MEMSYS.2011.5734349

Mechano-optical switching in a mems integrated photonic crystal slab waveguide. / Chakkalakkal Abdulla, S.M.; Kauppinen, L.J.; Dijkstra, Mindert et al.
Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011. USA: IEEE, 2011. p. 9-12.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Mechano-optical switching in a mems integrated photonic crystal slab waveguide

AU - Chakkalakkal Abdulla, S.M.

AU - Kauppinen, L.J.

AU - Dijkstra, Mindert

AU - Dijkstra, Marcel

AU - Berenschot, Johan W.

AU - de Boer, Meint J.

AU - de Ridder, R.M.

AU - Krijnen, Gijsbertus J.M.

N1 - Conference code: 24

PY - 2011/1/23

Y1 - 2011/1/23

N2 - A photonic crystal slab waveguide (PhC-WG) with an integrated MEMS bimorph cantilever actuator has been successfully fabricated using deep UV lithography and surface micromaching techniques. The cantilever is equipped with tips that are self-aligned with respect to the holes of the PhC-WG such that on electrostatic actuation, with modest voltages of less than 10 V, these tips move into the holes. This provides electro-opto-mechanical modulation of light-transmission, up to 80%, for interaction lengths as short as 10 μm. The device is monolithically integrated and designed to operate in the C-band of the telecommunication wavelengths.

AB - A photonic crystal slab waveguide (PhC-WG) with an integrated MEMS bimorph cantilever actuator has been successfully fabricated using deep UV lithography and surface micromaching techniques. The cantilever is equipped with tips that are self-aligned with respect to the holes of the PhC-WG such that on electrostatic actuation, with modest voltages of less than 10 V, these tips move into the holes. This provides electro-opto-mechanical modulation of light-transmission, up to 80%, for interaction lengths as short as 10 μm. The device is monolithically integrated and designed to operate in the C-band of the telecommunication wavelengths.

KW - METIS-279134

KW - EWI-19561

KW - IR-75916

U2 - 10.1109/MEMSYS.2011.5734349

DO - 10.1109/MEMSYS.2011.5734349

M3 - Conference contribution

SN - 978-1-4244-9633-4

SP - 9

EP - 12

BT - Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011

PB - IEEE

CY - USA

T2 - 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011

Y2 - 23 January 2011 through 27 January 2011

ER -