Mechano-optical switching in a mems integrated photonic crystal slab waveguide

S.M. Chakkalakkal Abdulla, L.J. Kauppinen, Mindert Dijkstra, Marcel Dijkstra, Johan W. Berenschot, Meint J. de Boer, R.M. de Ridder, Gijsbertus J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

8 Citations (Scopus)

Abstract

A photonic crystal slab waveguide (PhC-WG) with an integrated MEMS bimorph cantilever actuator has been successfully fabricated using deep UV lithography and surface micromaching techniques. The cantilever is equipped with tips that are self-aligned with respect to the holes of the PhC-WG such that on electrostatic actuation, with modest voltages of less than 10 V, these tips move into the holes. This provides electro-opto-mechanical modulation of light-transmission, up to 80%, for interaction lengths as short as 10 μm. The device is monolithically integrated and designed to operate in the C-band of the telecommunication wavelengths.
Original languageUndefined
Title of host publicationProceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Place of PublicationUSA
PublisherIEEE Micro Electro Mechanical Systems
Pages9-12
Number of pages4
ISBN (Print)978-1-4244-9633-4
DOIs
Publication statusPublished - 23 Jan 2011
Event24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
Duration: 23 Jan 201127 Jan 2011
Conference number: 24

Publication series

Name
PublisherIEEE Micro Electro Mechanical Systems

Conference

Conference24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Abbreviated titleMEMS
CountryMexico
CityCancun
Period23/01/1127/01/11

Keywords

  • METIS-279134
  • EWI-19561
  • IR-75916

Cite this

Chakkalakkal Abdulla, S. M., Kauppinen, L. J., Dijkstra, M., Dijkstra, M., Berenschot, J. W., de Boer, M. J., ... Krijnen, G. J. M. (2011). Mechano-optical switching in a mems integrated photonic crystal slab waveguide. In Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 (pp. 9-12). USA: IEEE Micro Electro Mechanical Systems. https://doi.org/10.1109/MEMSYS.2011.5734349
Chakkalakkal Abdulla, S.M. ; Kauppinen, L.J. ; Dijkstra, Mindert ; Dijkstra, Marcel ; Berenschot, Johan W. ; de Boer, Meint J. ; de Ridder, R.M. ; Krijnen, Gijsbertus J.M. / Mechano-optical switching in a mems integrated photonic crystal slab waveguide. Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011. USA : IEEE Micro Electro Mechanical Systems, 2011. pp. 9-12
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title = "Mechano-optical switching in a mems integrated photonic crystal slab waveguide",
abstract = "A photonic crystal slab waveguide (PhC-WG) with an integrated MEMS bimorph cantilever actuator has been successfully fabricated using deep UV lithography and surface micromaching techniques. The cantilever is equipped with tips that are self-aligned with respect to the holes of the PhC-WG such that on electrostatic actuation, with modest voltages of less than 10 V, these tips move into the holes. This provides electro-opto-mechanical modulation of light-transmission, up to 80{\%}, for interaction lengths as short as 10 μm. The device is monolithically integrated and designed to operate in the C-band of the telecommunication wavelengths.",
keywords = "METIS-279134, EWI-19561, IR-75916",
author = "{Chakkalakkal Abdulla}, S.M. and L.J. Kauppinen and Mindert Dijkstra and Marcel Dijkstra and Berenschot, {Johan W.} and {de Boer}, {Meint J.} and {de Ridder}, R.M. and Krijnen, {Gijsbertus J.M.}",
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day = "23",
doi = "10.1109/MEMSYS.2011.5734349",
language = "Undefined",
isbn = "978-1-4244-9633-4",
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Chakkalakkal Abdulla, SM, Kauppinen, LJ, Dijkstra, M, Dijkstra, M, Berenschot, JW, de Boer, MJ, de Ridder, RM & Krijnen, GJM 2011, Mechano-optical switching in a mems integrated photonic crystal slab waveguide. in Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011. IEEE Micro Electro Mechanical Systems, USA, pp. 9-12, 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, Cancun, Mexico, 23/01/11. https://doi.org/10.1109/MEMSYS.2011.5734349

Mechano-optical switching in a mems integrated photonic crystal slab waveguide. / Chakkalakkal Abdulla, S.M.; Kauppinen, L.J.; Dijkstra, Mindert; Dijkstra, Marcel; Berenschot, Johan W.; de Boer, Meint J.; de Ridder, R.M.; Krijnen, Gijsbertus J.M.

Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011. USA : IEEE Micro Electro Mechanical Systems, 2011. p. 9-12.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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T1 - Mechano-optical switching in a mems integrated photonic crystal slab waveguide

AU - Chakkalakkal Abdulla, S.M.

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AU - Dijkstra, Mindert

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AU - Berenschot, Johan W.

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AU - de Ridder, R.M.

AU - Krijnen, Gijsbertus J.M.

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N2 - A photonic crystal slab waveguide (PhC-WG) with an integrated MEMS bimorph cantilever actuator has been successfully fabricated using deep UV lithography and surface micromaching techniques. The cantilever is equipped with tips that are self-aligned with respect to the holes of the PhC-WG such that on electrostatic actuation, with modest voltages of less than 10 V, these tips move into the holes. This provides electro-opto-mechanical modulation of light-transmission, up to 80%, for interaction lengths as short as 10 μm. The device is monolithically integrated and designed to operate in the C-band of the telecommunication wavelengths.

AB - A photonic crystal slab waveguide (PhC-WG) with an integrated MEMS bimorph cantilever actuator has been successfully fabricated using deep UV lithography and surface micromaching techniques. The cantilever is equipped with tips that are self-aligned with respect to the holes of the PhC-WG such that on electrostatic actuation, with modest voltages of less than 10 V, these tips move into the holes. This provides electro-opto-mechanical modulation of light-transmission, up to 80%, for interaction lengths as short as 10 μm. The device is monolithically integrated and designed to operate in the C-band of the telecommunication wavelengths.

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BT - Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011

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Chakkalakkal Abdulla SM, Kauppinen LJ, Dijkstra M, Dijkstra M, Berenschot JW, de Boer MJ et al. Mechano-optical switching in a mems integrated photonic crystal slab waveguide. In Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011. USA: IEEE Micro Electro Mechanical Systems. 2011. p. 9-12 https://doi.org/10.1109/MEMSYS.2011.5734349