Mechano-optical switching in a mems integrated photonic crystal slab waveguide

S.M. Chakkalakkal Abdulla, L.J. Kauppinen, Mindert Dijkstra, Marcel Dijkstra, Johan W. Berenschot, Meint J. de Boer, R.M. de Ridder, Gijsbertus J.M. Krijnen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    10 Citations (Scopus)

    Abstract

    A photonic crystal slab waveguide (PhC-WG) with an integrated MEMS bimorph cantilever actuator has been successfully fabricated using deep UV lithography and surface micromaching techniques. The cantilever is equipped with tips that are self-aligned with respect to the holes of the PhC-WG such that on electrostatic actuation, with modest voltages of less than 10 V, these tips move into the holes. This provides electro-opto-mechanical modulation of light-transmission, up to 80%, for interaction lengths as short as 10 μm. The device is monolithically integrated and designed to operate in the C-band of the telecommunication wavelengths.
    Original languageUndefined
    Title of host publicationProceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
    Place of PublicationUSA
    PublisherIEEE Micro Electro Mechanical Systems
    Pages9-12
    Number of pages4
    ISBN (Print)978-1-4244-9633-4
    DOIs
    Publication statusPublished - 23 Jan 2011
    Event24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico
    Duration: 23 Jan 201127 Jan 2011
    Conference number: 24

    Publication series

    Name
    PublisherIEEE Micro Electro Mechanical Systems

    Conference

    Conference24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
    Abbreviated titleMEMS
    CountryMexico
    CityCancun
    Period23/01/1127/01/11

    Keywords

    • METIS-279134
    • EWI-19561
    • IR-75916

    Cite this

    Chakkalakkal Abdulla, S. M., Kauppinen, L. J., Dijkstra, M., Dijkstra, M., Berenschot, J. W., de Boer, M. J., ... Krijnen, G. J. M. (2011). Mechano-optical switching in a mems integrated photonic crystal slab waveguide. In Proceedings of the 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 (pp. 9-12). USA: IEEE Micro Electro Mechanical Systems. https://doi.org/10.1109/MEMSYS.2011.5734349