Mechano-optical waveguide on-off intensity modulator

G.J. Veldhuis; C. Gui; T. Nauta; T.M. Koster; J.W. Berenschot; P.V. Lambeck; J.G.E. Gardeniers; M.C. Elwenspoek

doi:10.1364/OL.23.001532

Mechano-optical waveguide on-off intensity modulator

G.J. Veldhuis, C. Gui, T. Nauta, T.M. Koster, J.W. Berenschot, P.V. Lambeck, J.G.E. Gardeniers, M.C. Elwenspoek

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Abstract

High-extinction on–off modulators are essential for channel selection in integrated-optical sensor arrays. We report a standard SiON-technology-based electrostatically driven integrated mechano-optical waveguide on–off intensity modulator. On–off modulation is achieved by movement of an absorbing element into and out of the evanescent field of the guided mode. An extinction ratio of >37 dB at an actuation voltage of <30 V was achieved in a 6 mm×4 mm device for a wavelength of 632.8 nm. Full wafer-scale fabrication is made possible by use of chemical mechanical polishing and aligned wafer bonding

Original language	English
Pages (from-to)	1532-1534
Number of pages	3
Journal	Optics letters
Volume	23
Issue number	19
DOIs	https://doi.org/10.1364/OL.23.001532
Publication status	Published - 1 Oct 1998

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title = "Mechano-optical waveguide on-off intensity modulator",

abstract = "High-extinction on–off modulators are essential for channel selection in integrated-optical sensor arrays. We report a standard SiON-technology-based electrostatically driven integrated mechano-optical waveguide on–off intensity modulator. On–off modulation is achieved by movement of an absorbing element into and out of the evanescent field of the guided mode. An extinction ratio of >37 dB at an actuation voltage of <30 V was achieved in a 6 mm×4 mm device for a wavelength of 632.8 nm. Full wafer-scale fabrication is made possible by use of chemical mechanical polishing and aligned wafer bonding",

author = "G.J. Veldhuis and C. Gui and T. Nauta and T.M. Koster and J.W. Berenschot and P.V. Lambeck and J.G.E. Gardeniers and M.C. Elwenspoek",

year = "1998",

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doi = "10.1364/OL.23.001532",

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T1 - Mechano-optical waveguide on-off intensity modulator

AU - Veldhuis, G.J.

AU - Gui, C.

AU - Nauta, T.

AU - Koster, T.M.

AU - Berenschot, J.W.

AU - Lambeck, P.V.

AU - Gardeniers, J.G.E.

AU - Elwenspoek, M.C.

PY - 1998/10/1

Y1 - 1998/10/1

N2 - High-extinction on–off modulators are essential for channel selection in integrated-optical sensor arrays. We report a standard SiON-technology-based electrostatically driven integrated mechano-optical waveguide on–off intensity modulator. On–off modulation is achieved by movement of an absorbing element into and out of the evanescent field of the guided mode. An extinction ratio of >37 dB at an actuation voltage of <30 V was achieved in a 6 mm×4 mm device for a wavelength of 632.8 nm. Full wafer-scale fabrication is made possible by use of chemical mechanical polishing and aligned wafer bonding

AB - High-extinction on–off modulators are essential for channel selection in integrated-optical sensor arrays. We report a standard SiON-technology-based electrostatically driven integrated mechano-optical waveguide on–off intensity modulator. On–off modulation is achieved by movement of an absorbing element into and out of the evanescent field of the guided mode. An extinction ratio of >37 dB at an actuation voltage of <30 V was achieved in a 6 mm×4 mm device for a wavelength of 632.8 nm. Full wafer-scale fabrication is made possible by use of chemical mechanical polishing and aligned wafer bonding

U2 - 10.1364/OL.23.001532

DO - 10.1364/OL.23.001532

M3 - Article

SN - 0146-9592

VL - 23

SP - 1532

EP - 1534

JO - Optics letters

JF - Optics letters

IS - 19

ER -

Mechano-optical waveguide on-off intensity modulator

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