Mechano-optical wavelength tuning in a photonic crystal microcavity with sub-1 V drive voltage

A micro-bimorph cantilever with self-aligned nano-tips is monolithically integrated with a photonic crystal based device using optical and deep-UV lithography techniques. Upon electrostatic actuation, the dielectric nano-tips perturb the optical field providing electromechano-optical modulation of light. Static tuning of the optical transmission spectra by more than 600 pm is measured with a sub – 1 V drive voltage, resulting in a modulation as high as 21 dB. The observed strong electromechano-optical effect may find application in power efficient devices for optical communication networks, e.g. as wavelength routing element.