Abstract
The contribution of the paper is on the conceptual design of mounts, using MiMo state space models describing the spatial flexible multibody system dynamics. Furthermore the contribution is on the evaluation of acceleration feedback versus force-feedback of a hard-mounted metrology frame suspension of a photolithography machine. It includes the modal decoupling controller design. It will be shown that from a vibration energy flow point of view the use of acceleration sensors are preferred.
Original language | English |
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Title of host publication | Motion and Vibration Control |
Editors | Heinz Ulbrich, Lucas Ginzinger |
Place of Publication | Berlin, Germany |
Publisher | Springer |
Pages | 315-324 |
ISBN (Electronic) | 978-1-4020-9438-5 |
ISBN (Print) | 978-1-4020-9437-8 |
DOIs | |
Publication status | Published - 15 Sept 2008 |
Event | 9th International Conference on Motion and Vibration Control, MOVIC 2008 - Technische Universität München, Munich, Germany Duration: 15 Sept 2008 → 18 Sept 2008 Conference number: 9 |
Conference
Conference | 9th International Conference on Motion and Vibration Control, MOVIC 2008 |
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Abbreviated title | MOVIC |
Country/Territory | Germany |
City | Munich |
Period | 15/09/08 → 18/09/08 |
Keywords
- METIS-250738