Mechatronic Design of Hard-Mount Concepts for Precision Equipment

J. van Dijk

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Abstract

    The contribution of the paper is on the conceptual design of mounts, using MiMo state space models describing the spatial flexible multibody system dynamics. Furthermore the contribution is on the evaluation of acceleration feedback versus force-feedback of a hard-mounted metrology frame suspension of a photolithography machine. It includes the modal decoupling controller design. It will be shown that from a vibration energy flow point of view the use of acceleration sensors are preferred.
    Original languageEnglish
    Title of host publicationMotion and Vibration Control
    EditorsHeinz Ulbrich, Lucas Ginzinger
    Place of PublicationBerlin, Germany
    PublisherSpringer
    Pages315-324
    ISBN (Electronic)978-1-4020-9438-5
    ISBN (Print)978-1-4020-9437-8
    DOIs
    Publication statusPublished - 15 Sep 2008
    Event9th International Conference on Motion and Vibration Control, MOVIC 2008 - Technische Universität München, Munich, Germany
    Duration: 15 Sep 200818 Sep 2008
    Conference number: 9

    Conference

    Conference9th International Conference on Motion and Vibration Control, MOVIC 2008
    Abbreviated titleMOVIC
    CountryGermany
    CityMunich
    Period15/09/0818/09/08

    Keywords

    • METIS-250738

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