Thin square membranes including a deep circular corrugation are realized and tested for application in a strain-based pressure sensor. Package-induced stresses are reduced and relief of the residual stress is obtained, resulting in a larger pressure sensitivity and a reduced temperature sensitivity. Finite element method simulations were carried out, showing that the pressure-deflection behaviour of the structure is close to that of a circular membrane with clamped edge but free radial motion.
|Number of pages||4|
|Journal||Journal of micromechanics and microengineering|
|Publication status||Published - Dec 1993|
|Event||4th MicroMechanics Europe Workshop, MME 1993 - Neuchatel|
Duration: 7 Sep 1993 → 8 Sep 1993
Conference number: 4