Membranes fabricated with a deep single corrugation for package stress reduction and residual stress relief

V.L. Spiering; S. Bouwstra; J.F. Burger; M.C. Elwenspoek

doi:10.1088/0960-1317/3/4/020

Membranes fabricated with a deep single corrugation for package stress reduction and residual stress relief

V.L. Spiering, S. Bouwstra, J.F. Burger, M.C. Elwenspoek

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Abstract

Thin square membranes including a deep circular corrugation are realized and tested for application in a strain-based pressure sensor. Package-induced stresses are reduced and relief of the residual stress is obtained, resulting in a larger pressure sensitivity and a reduced temperature sensitivity. Finite element method simulations were carried out, showing that the pressure-deflection behaviour of the structure is close to that of a circular membrane with clamped edge but free radial motion.

Original language	English
Pages (from-to)	243-246
Number of pages	4
Journal	Journal of micromechanics and microengineering
Volume	3
Issue number	4
DOIs	https://doi.org/10.1088/0960-1317/3/4/020
Publication status	Published - Dec 1993
Event	4th MicroMechanics Europe Workshop, MME 1993 - Neuchatel Duration: 7 Sept 1993 → 8 Sept 1993 Conference number: 4

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title = "Membranes fabricated with a deep single corrugation for package stress reduction and residual stress relief",

abstract = "Thin square membranes including a deep circular corrugation are realized and tested for application in a strain-based pressure sensor. Package-induced stresses are reduced and relief of the residual stress is obtained, resulting in a larger pressure sensitivity and a reduced temperature sensitivity. Finite element method simulations were carried out, showing that the pressure-deflection behaviour of the structure is close to that of a circular membrane with clamped edge but free radial motion.",

author = "V.L. Spiering and S. Bouwstra and J.F. Burger and M.C. Elwenspoek",

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AU - Bouwstra, S.

AU - Burger, J.F.

AU - Elwenspoek, M.C.

N1 - Conference code: 4

PY - 1993/12

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AB - Thin square membranes including a deep circular corrugation are realized and tested for application in a strain-based pressure sensor. Package-induced stresses are reduced and relief of the residual stress is obtained, resulting in a larger pressure sensitivity and a reduced temperature sensitivity. Finite element method simulations were carried out, showing that the pressure-deflection behaviour of the structure is close to that of a circular membrane with clamped edge but free radial motion.

U2 - 10.1088/0960-1317/3/4/020

DO - 10.1088/0960-1317/3/4/020

M3 - Article

SN - 0960-1317

VL - 3

SP - 243

EP - 246

JO - Journal of micromechanics and microengineering

JF - Journal of micromechanics and microengineering

IS - 4

T2 - 4th MicroMechanics Europe Workshop, MME 1993

Y2 - 7 September 1993 through 8 September 1993

ER -

Membranes fabricated with a deep single corrugation for package stress reduction and residual stress relief

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