Membranes fabricated with a deep single corrugation for package stress reduction and residual stress relief

V.L. Spiering, S. Bouwstra, J.F. Burger, M.C. Elwenspoek

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Abstract

Thin square membranes including a deep circular corrugation are realized and tested for application in a strain-based pressure sensor. Package-induced stresses are reduced and relief of the residual stress is obtained, resulting in a larger pressure sensitivity and a reduced temperature sensitivity. Finite element method simulations were carried out, showing that the pressure-deflection behaviour of the structure is close to that of a circular membrane with clamped edge but free radial motion.
Original languageEnglish
Pages (from-to)243-246
Number of pages4
JournalJournal of micromechanics and microengineering
Volume3
Issue number4
DOIs
Publication statusPublished - Dec 1993
Event4th MicroMechanics Europe Workshop, MME 1993 - Neuchatel
Duration: 7 Sep 19938 Sep 1993
Conference number: 4

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Stress relief
Residual stresses
Membranes
Pressure sensors
Finite element method
Temperature

Cite this

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title = "Membranes fabricated with a deep single corrugation for package stress reduction and residual stress relief",
abstract = "Thin square membranes including a deep circular corrugation are realized and tested for application in a strain-based pressure sensor. Package-induced stresses are reduced and relief of the residual stress is obtained, resulting in a larger pressure sensitivity and a reduced temperature sensitivity. Finite element method simulations were carried out, showing that the pressure-deflection behaviour of the structure is close to that of a circular membrane with clamped edge but free radial motion.",
author = "V.L. Spiering and S. Bouwstra and J.F. Burger and M.C. Elwenspoek",
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Membranes fabricated with a deep single corrugation for package stress reduction and residual stress relief. / Spiering, V.L.; Bouwstra, S.; Burger, J.F.; Elwenspoek, M.C.

In: Journal of micromechanics and microengineering, Vol. 3, No. 4, 12.1993, p. 243-246.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - Membranes fabricated with a deep single corrugation for package stress reduction and residual stress relief

AU - Spiering, V.L.

AU - Bouwstra, S.

AU - Burger, J.F.

AU - Elwenspoek, M.C.

PY - 1993/12

Y1 - 1993/12

N2 - Thin square membranes including a deep circular corrugation are realized and tested for application in a strain-based pressure sensor. Package-induced stresses are reduced and relief of the residual stress is obtained, resulting in a larger pressure sensitivity and a reduced temperature sensitivity. Finite element method simulations were carried out, showing that the pressure-deflection behaviour of the structure is close to that of a circular membrane with clamped edge but free radial motion.

AB - Thin square membranes including a deep circular corrugation are realized and tested for application in a strain-based pressure sensor. Package-induced stresses are reduced and relief of the residual stress is obtained, resulting in a larger pressure sensitivity and a reduced temperature sensitivity. Finite element method simulations were carried out, showing that the pressure-deflection behaviour of the structure is close to that of a circular membrane with clamped edge but free radial motion.

U2 - 10.1088/0960-1317/3/4/020

DO - 10.1088/0960-1317/3/4/020

M3 - Article

VL - 3

SP - 243

EP - 246

JO - Journal of micromechanics and microengineering

JF - Journal of micromechanics and microengineering

SN - 0960-1317

IS - 4

ER -