Membranes fabricated with a deep single corrugation for package stress reduction and residual stress relief

V.L. Spiering, S. Bouwstra, J.F. Burger, M.C. Elwenspoek

Research output: Contribution to conference › Poster › Other research output

Original language	English
Publication status	Published - 7 Sep 1993
Event	4th MicroMechanics Europe Workshop, MME 1993 - Neuchatel Duration: 7 Sep 1993 → 8 Sep 1993 Conference number: 4

Conference	4th MicroMechanics Europe Workshop, MME 1993
Abbreviated title	MME
City	Neuchatel
Period	7/09/93 → 8/09/93

Cite this

@conference{ec25c5a59eb94e50a76762a146d7ef90,

title = "Membranes fabricated with a deep single corrugation for package stress reduction and residual stress relief",

author = "V.L. Spiering and S. Bouwstra and J.F. Burger and M.C. Elwenspoek",

year = "1993",

month = sep,

day = "7",

language = "English",

note = "4th MicroMechanics Europe Workshop, MME 1993, MME ; Conference date: 07-09-1993 Through 08-09-1993",

}