Membranes fabricated with a deep single corrugation for package stress reduction and residual stress relief

V.L. Spiering, S. Bouwstra, J.F. Burger, M.C. Elwenspoek

    Research output: Contribution to conferencePosterOther research output

    18 Citations (Scopus)
    Original languageEnglish
    Publication statusPublished - 7 Sep 1993
    Event4th MicroMechanics Europe Workshop, MME 1993 - Neuchatel
    Duration: 7 Sep 19938 Sep 1993
    Conference number: 4

    Conference

    Conference4th MicroMechanics Europe Workshop, MME 1993
    Abbreviated titleMME
    CityNeuchatel
    Period7/09/938/09/93

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