Membranes fabricated with a deep single corrugation for package stress reduction and residual stress relief

V.L. Spiering, S. Bouwstra, J.F. Burger, M.C. Elwenspoek

    Research output: Contribution to conferencePosterOther research output

    19 Citations (Scopus)
    Original languageEnglish
    Publication statusPublished - 7 Sept 1993
    Event4th MicroMechanics Europe Workshop, MME 1993 - Neuchatel
    Duration: 7 Sept 19938 Sept 1993
    Conference number: 4


    Conference4th MicroMechanics Europe Workshop, MME 1993
    Abbreviated titleMME

    Cite this