TY - JOUR
T1 - MEMS applications of NiTi based shape memory alloys
T2 - A review
AU - Mehrpouya, Mehrshad
AU - Bidsorkhi, Hossein Cheraghi
PY - 2016
Y1 - 2016
N2 - Shape Memory Alloys (SMAs), famous class of smart materials with unique functional and intelligence properties, have attracted much attention in recent decades. These materials offer a potential solution for microstructure devices due to their high mechanical performances, high power to weight ratio, large deformation, biocompatibility, etc. Nickel-Titanium (NiTi) is the most applied SMAs thin film due to its high recoverable strain and massive forces. Therefore, these high-performance materials are able to make microactuators in Micro-Electro-Mechanical System (MEMS). This paper investigates the recent development of material processing approaches for NiTi thin films and introduces various types of MEMS applications such as microvalves, micropumps, microgrippers, microsensors, etc.
AB - Shape Memory Alloys (SMAs), famous class of smart materials with unique functional and intelligence properties, have attracted much attention in recent decades. These materials offer a potential solution for microstructure devices due to their high mechanical performances, high power to weight ratio, large deformation, biocompatibility, etc. Nickel-Titanium (NiTi) is the most applied SMAs thin film due to its high recoverable strain and massive forces. Therefore, these high-performance materials are able to make microactuators in Micro-Electro-Mechanical System (MEMS). This paper investigates the recent development of material processing approaches for NiTi thin films and introduces various types of MEMS applications such as microvalves, micropumps, microgrippers, microsensors, etc.
KW - MEMS
KW - Thin films
KW - SMAs
KW - NiTi
KW - TWSME
KW - Alloys
UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-85022195602&partnerID=MN8TOARS
U2 - 10.2174/1876402908666161102151453
DO - 10.2174/1876402908666161102151453
M3 - Article
VL - 8
SP - 79
EP - 91
JO - Micro and Nanosystems
JF - Micro and Nanosystems
SN - 1876-4029
IS - 2
ER -