MEMS based hair flow-sensors as model systems for acoustic perception studies

Gijs J.M. Krijnen, Marcel Dijkstra, John J. van Baar, J.H. de Boer, Theo S.J. Lammerink, Remco Wiegerink

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    Arrays of MEMS fabricated flow sensors inspired by the acoustic flow-sensitive hairs found on the cerci of crickets, have been designed, fabricated and characterized. The hairs consist of up to 1 mm long SU-8 structures mounted on suspended membranes with normal translational and rotational degrees of freedom. Electrodes on the membrane and on the substrate form variable capacitors allowing for capacitive read-out. Capacitance versus voltage, frequency dependency and directional sensitivity measurements have been successfully carried out on fabricated sensor arrays, showing the viability of the concept. The sensors form a model-system allowing for investigations on sensory acoustics by their arrayed nature, their adaptivity via electrostatic interaction (frequency tuning and parametric amplifica- tion) and their susceptibility to noise (stochastic resonance)
    Original languageEnglish
    Number of pages4
    Publication statusPublished - 20 Jul 2005
    EventInternational Conference on Bio-Nano-Information Fusion 2005 - Marina del Rey, United States
    Duration: 20 Jul 200522 Jul 2005


    ConferenceInternational Conference on Bio-Nano-Information Fusion 2005
    Country/TerritoryUnited States
    CityMarina del Rey


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