Abstract
Arrays of MEMS fabricated flow sensors inspired by the acoustic flow-sensitive hairs found on the cerci of crickets, have been designed, fabricated and characterized. The hairs consist of up to 1 mm long SU-8 structures mounted on suspended membranes with normal translational and rotational degrees of freedom. Electrodes on the membrane and on the substrate form variable capacitors allowing for capacitive read-out. Capacitance versus voltage, frequency dependency and directional sensitivity measurements have been successfully carried out on fabricated sensor arrays, showing the viability of the concept. The sensors form a model-system allowing for investigations on sensory acoustics by their arrayed nature, their adaptivity via electrostatic interaction (frequency tuning and parametric amplifica- tion) and their susceptibility to noise (stochastic resonance)
Original language | English |
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Pages | 1-4 |
Number of pages | 4 |
Publication status | Published - 20 Jul 2005 |
Event | International Conference on Bio-Nano-Information Fusion 2005 - Marina del Rey, United States Duration: 20 Jul 2005 → 22 Jul 2005 |
Conference
Conference | International Conference on Bio-Nano-Information Fusion 2005 |
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Country/Territory | United States |
City | Marina del Rey |
Period | 20/07/05 → 22/07/05 |