MEMS based hair flow-sensors as model systems for acoustic perception studies

Gijs J.M. Krijnen; Marcel Dijkstra; John J. van Baar; J.H. de Boer; Theo S.J. Lammerink; Remco Wiegerink

MEMS based hair flow-sensors as model systems for acoustic perception studies

Gijs J.M. Krijnen, Marcel Dijkstra, John J. van Baar, J.H. de Boer, Theo S.J. Lammerink, Remco Wiegerink

Research output: Contribution to conference › Paper › Academic › peer-review

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Abstract

Arrays of MEMS fabricated flow sensors inspired by the acoustic flow-sensitive hairs found on the cerci of crickets, have been designed, fabricated and characterized. The hairs consist of up to 1 mm long SU-8 structures mounted on suspended membranes with normal translational and rotational degrees of freedom. Electrodes on the membrane and on the substrate form variable capacitors allowing for capacitive read-out. Capacitance versus voltage, frequency dependency and directional sensitivity measurements have been successfully carried out on fabricated sensor arrays, showing the viability of the concept. The sensors form a model-system allowing for investigations on sensory acoustics by their arrayed nature, their adaptivity via electrostatic interaction (frequency tuning and parametric amplifica- tion) and their susceptibility to noise (stochastic resonance)

Original language	English
Pages	1-4
Number of pages	4
Publication status	Published - 20 Jul 2005
Event	International Conference on Bio-Nano-Information Fusion 2005 - Marina del Rey, United States Duration: 20 Jul 2005 → 22 Jul 2005

Conference

Conference	International Conference on Bio-Nano-Information Fusion 2005
Country	United States
City	Marina del Rey
Period	20/07/05 → 22/07/05

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title = "MEMS based hair flow-sensors as model systems for acoustic perception studies",

abstract = "Arrays of MEMS fabricated flow sensors inspired by the acoustic flow-sensitive hairs found on the cerci of crickets, have been designed, fabricated and characterized. The hairs consist of up to 1 mm long SU-8 structures mounted on suspended membranes with normal translational and rotational degrees of freedom. Electrodes on the membrane and on the substrate form variable capacitors allowing for capacitive read-out. Capacitance versus voltage, frequency dependency and directional sensitivity measurements have been successfully carried out on fabricated sensor arrays, showing the viability of the concept. The sensors form a model-system allowing for investigations on sensory acoustics by their arrayed nature, their adaptivity via electrostatic interaction (frequency tuning and parametric amplifica- tion) and their susceptibility to noise (stochastic resonance)",

author = "Krijnen, {Gijs J.M.} and Marcel Dijkstra and {van Baar}, {John J.} and {de Boer}, J.H. and Lammerink, {Theo S.J.} and Remco Wiegerink",

year = "2005",

month = jul,

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language = "English",

pages = "1--4",

note = "International Conference on Bio-Nano-Information Fusion 2005 ; Conference date: 20-07-2005 Through 22-07-2005",

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MEMS based hair flow-sensors as model systems for acoustic perception studies. / Krijnen, Gijs J.M.; Dijkstra, Marcel; van Baar, John J.; de Boer, J.H.; Lammerink, Theo S.J.; Wiegerink, Remco.

2005. 1-4 Paper presented at International Conference on Bio-Nano-Information Fusion 2005, Marina del Rey, United States.

Research output: Contribution to conference › Paper › Academic › peer-review

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AU - Krijnen, Gijs J.M.

AU - Dijkstra, Marcel

AU - van Baar, John J.

AU - de Boer, J.H.

AU - Lammerink, Theo S.J.

AU - Wiegerink, Remco

PY - 2005/7/20

Y1 - 2005/7/20

N2 - Arrays of MEMS fabricated flow sensors inspired by the acoustic flow-sensitive hairs found on the cerci of crickets, have been designed, fabricated and characterized. The hairs consist of up to 1 mm long SU-8 structures mounted on suspended membranes with normal translational and rotational degrees of freedom. Electrodes on the membrane and on the substrate form variable capacitors allowing for capacitive read-out. Capacitance versus voltage, frequency dependency and directional sensitivity measurements have been successfully carried out on fabricated sensor arrays, showing the viability of the concept. The sensors form a model-system allowing for investigations on sensory acoustics by their arrayed nature, their adaptivity via electrostatic interaction (frequency tuning and parametric amplifica- tion) and their susceptibility to noise (stochastic resonance)

AB - Arrays of MEMS fabricated flow sensors inspired by the acoustic flow-sensitive hairs found on the cerci of crickets, have been designed, fabricated and characterized. The hairs consist of up to 1 mm long SU-8 structures mounted on suspended membranes with normal translational and rotational degrees of freedom. Electrodes on the membrane and on the substrate form variable capacitors allowing for capacitive read-out. Capacitance versus voltage, frequency dependency and directional sensitivity measurements have been successfully carried out on fabricated sensor arrays, showing the viability of the concept. The sensors form a model-system allowing for investigations on sensory acoustics by their arrayed nature, their adaptivity via electrostatic interaction (frequency tuning and parametric amplifica- tion) and their susceptibility to noise (stochastic resonance)

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T2 - International Conference on Bio-Nano-Information Fusion 2005

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