MEMS based hair flow-sensors as model systems for acoustic perception studies

Gijs J.M. Krijnen, Marcel Dijkstra, John J. van Baar, Siripurapu S. Shankar, Winfred J. Kuipers, Rik J.H. de Boer, Dominique Altpeter, Theo S.J. Lammerink, Remco Wiegerink

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    Arrays of MEMS fabricated flow sensors inspired by the acoustic flow-sensitive hairs found on the cerci of crickets have been designed, fabricated and characterized. The hairs consist of up to 1 mm long SU-8 structures mounted on suspended membranes with normal translational and rotational degrees of freedom. Electrodes on themembrane and on the substrate form variable capacitors, allowing for capacitive read-out. Capacitance versus voltage, frequency dependence and directional sensitivity measurements have been successfully carried out on fabricated sensor arrays, showing the viability of the concept. The sensors form a model system allowing for investigations on sensory acoustics by their arrayed nature, their adaptivity via electrostatic interaction (frequency tuning and parametric amplification) and their susceptibility to noise (stochastic resonance).
    Original languageEnglish
    Pages (from-to)S84-S89
    Number of pages6
    Publication statusPublished - 25 Jan 2006
    EventInternational Conference on Bio-Nano-Information Fusion 2005 - Marina del Rey, United States
    Duration: 20 Jul 200522 Jul 2005


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