MEMS based hair flow-sensors as model systems for acoustic perception studies

Gijs J.M. Krijnen; Marcel Dijkstra; John J. van Baar; Siripurapu S. Shankar; Winfred J. Kuipers; Rik J.H. de Boer; Dominique Altpeter; Theo S.J. Lammerink; Remco Wiegerink

doi:10.1088/0957-4484/17/4/013

MEMS based hair flow-sensors as model systems for acoustic perception studies

Gijs J.M. Krijnen, Marcel Dijkstra, John J. van Baar, Siripurapu S. Shankar, Winfred J. Kuipers, Rik J.H. de Boer, Dominique Altpeter, Theo S.J. Lammerink, Remco Wiegerink

Research output: Contribution to journal › Article › Academic › peer-review

125 Citations (Scopus)

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Abstract

Arrays of MEMS fabricated flow sensors inspired by the acoustic flow-sensitive hairs found on the cerci of crickets have been designed, fabricated and characterized. The hairs consist of up to 1 mm long SU-8 structures mounted on suspended membranes with normal translational and rotational degrees of freedom. Electrodes on themembrane and on the substrate form variable capacitors, allowing for capacitive read-out. Capacitance versus voltage, frequency dependence and directional sensitivity measurements have been successfully carried out on fabricated sensor arrays, showing the viability of the concept. The sensors form a model system allowing for investigations on sensory acoustics by their arrayed nature, their adaptivity via electrostatic interaction (frequency tuning and parametric amplification) and their susceptibility to noise (stochastic resonance).

Original language	English
Pages (from-to)	S84-S89
Number of pages	6
Journal	Nanotechnology
Volume	17
DOIs	https://doi.org/10.1088/0957-4484/17/4/013
Publication status	Published - 25 Jan 2006
Event	International Conference on Bio-Nano-Information Fusion 2005 - Marina del Rey, United States Duration: 20 Jul 2005 → 22 Jul 2005

Keywords

TST-Life like

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title = "MEMS based hair flow-sensors as model systems for acoustic perception studies",

abstract = "Arrays of MEMS fabricated flow sensors inspired by the acoustic flow-sensitive hairs found on the cerci of crickets have been designed, fabricated and characterized. The hairs consist of up to 1 mm long SU-8 structures mounted on suspended membranes with normal translational and rotational degrees of freedom. Electrodes on themembrane and on the substrate form variable capacitors, allowing for capacitive read-out. Capacitance versus voltage, frequency dependence and directional sensitivity measurements have been successfully carried out on fabricated sensor arrays, showing the viability of the concept. The sensors form a model system allowing for investigations on sensory acoustics by their arrayed nature, their adaptivity via electrostatic interaction (frequency tuning and parametric amplification) and their susceptibility to noise (stochastic resonance).",

keywords = "TST-Life like",

author = "Krijnen, {Gijs J.M.} and Marcel Dijkstra and {van Baar}, {John J.} and Shankar, {Siripurapu S.} and Kuipers, {Winfred J.} and {de Boer}, {Rik J.H.} and Dominique Altpeter and Lammerink, {Theo S.J.} and Remco Wiegerink",

year = "2006",

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day = "25",

doi = "10.1088/0957-4484/17/4/013",

language = "English",

volume = "17",

pages = "S84--S89",

journal = "Nanotechnology",

issn = "0957-4484",

publisher = "IOP Publishing Ltd.",

note = "International Conference on Bio-Nano-Information Fusion 2005 ; Conference date: 20-07-2005 Through 22-07-2005",

}

MEMS based hair flow-sensors as model systems for acoustic perception studies. / Krijnen, Gijs J.M.; Dijkstra, Marcel; van Baar, John J.; Shankar, Siripurapu S.; Kuipers, Winfred J.; de Boer, Rik J.H.; Altpeter, Dominique; Lammerink, Theo S.J.; Wiegerink, Remco.

In: Nanotechnology, Vol. 17, 25.01.2006, p. S84-S89.

Research output: Contribution to journal › Article › Academic › peer-review

TY - JOUR

T1 - MEMS based hair flow-sensors as model systems for acoustic perception studies

AU - Krijnen, Gijs J.M.

AU - Dijkstra, Marcel

AU - van Baar, John J.

AU - Shankar, Siripurapu S.

AU - Kuipers, Winfred J.

AU - de Boer, Rik J.H.

AU - Altpeter, Dominique

AU - Lammerink, Theo S.J.

AU - Wiegerink, Remco

PY - 2006/1/25

Y1 - 2006/1/25

N2 - Arrays of MEMS fabricated flow sensors inspired by the acoustic flow-sensitive hairs found on the cerci of crickets have been designed, fabricated and characterized. The hairs consist of up to 1 mm long SU-8 structures mounted on suspended membranes with normal translational and rotational degrees of freedom. Electrodes on themembrane and on the substrate form variable capacitors, allowing for capacitive read-out. Capacitance versus voltage, frequency dependence and directional sensitivity measurements have been successfully carried out on fabricated sensor arrays, showing the viability of the concept. The sensors form a model system allowing for investigations on sensory acoustics by their arrayed nature, their adaptivity via electrostatic interaction (frequency tuning and parametric amplification) and their susceptibility to noise (stochastic resonance).

AB - Arrays of MEMS fabricated flow sensors inspired by the acoustic flow-sensitive hairs found on the cerci of crickets have been designed, fabricated and characterized. The hairs consist of up to 1 mm long SU-8 structures mounted on suspended membranes with normal translational and rotational degrees of freedom. Electrodes on themembrane and on the substrate form variable capacitors, allowing for capacitive read-out. Capacitance versus voltage, frequency dependence and directional sensitivity measurements have been successfully carried out on fabricated sensor arrays, showing the viability of the concept. The sensors form a model system allowing for investigations on sensory acoustics by their arrayed nature, their adaptivity via electrostatic interaction (frequency tuning and parametric amplification) and their susceptibility to noise (stochastic resonance).

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DO - 10.1088/0957-4484/17/4/013

M3 - Article

VL - 17

SP - S84-S89

JO - Nanotechnology

JF - Nanotechnology

SN - 0957-4484

T2 - International Conference on Bio-Nano-Information Fusion 2005

Y2 - 20 July 2005 through 22 July 2005

ER -